@inproceedings{AdelmannHellmann2011, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {Different modulation schemes in fibre laser cutting}, series = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, booktitle = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, pages = {1 -- 6}, year = {2011}, subject = {Laserschneiden}, language = {en} } @inproceedings{AdelmannHellmann2011, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {DOE based optimization of fibre laser cutting of metals}, series = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, booktitle = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, pages = {7 -- 12}, year = {2011}, subject = {Laserschneiden}, language = {en} } @article{HockAdelmannHellmann2012, author = {Hock, Klaus and Adelmann, Benedikt and Hellmann, Ralf}, title = {Comparative study of remote fiber laser and water-jet guided laser cutting of thin film metal sheets}, series = {Physics procedia}, volume = {39}, journal = {Physics procedia}, pages = {225 -- 231}, year = {2012}, subject = {Laserschneiden}, language = {en} } @article{SchleierAdelmannEsenetal.2021, author = {Schleier, Max and Adelmann, Benedikt and Esen, Cemal and Glatzel, Uwe and Hellmann, Ralf}, title = {Development and evaluation of an image processing algorithm for monitoring fiber laser fusion cutting by a high-speed camera}, series = {Journal of Laser Applications}, volume = {2021}, journal = {Journal of Laser Applications}, number = {33}, doi = {10.2351/7.0000391}, pages = {032004 -- 032004}, year = {2021}, subject = {Faserlaser}, language = {en} } @article{AdelmannHellmann2021, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {Simultaneous Burr and Cut Interruption Detection during Laser Cutting with Neural Networks}, series = {Sensors}, volume = {2021}, journal = {Sensors}, number = {21}, doi = {10.3390/s21175831}, pages = {5831 -- 5831}, year = {2021}, subject = {Laserschneiden}, language = {en} } @article{AdelmannSchleierHellmann2021, author = {Adelmann, Benedikt and Schleier, Max and Hellmann, Ralf}, title = {Laser Cut Interruption Detection from Small Images by Using Convolutional Neural Network}, series = {Sensors}, volume = {2021}, journal = {Sensors}, number = {21(2)}, doi = {10.3390/s21020655}, pages = {655 -- 655}, year = {2021}, subject = {Laserschneiden}, language = {en} } @phdthesis{Adelmann2019, author = {Adelmann, Benedikt}, title = {Lasermaterialbearbeitung von Halbleitern und Keramiken f{\"u}r Anwendungen der Leistungselektronik}, publisher = {Shaker}, isbn = {978-3-8440-7111-5}, school = {Technische Hochschule Aschaffenburg}, year = {2019}, subject = {Laserbearbeitung}, language = {de} } @article{RothAdelmannHellmann2015, author = {Roth, Gian-Luca and Adelmann, Benedikt and Hellmann, Ralf}, title = {Cutting and Drilling of SiC Semiconductor by Fiber Laser}, series = {Journal of Laser Micro/Nanoengineering}, volume = {10}, journal = {Journal of Laser Micro/Nanoengineering}, number = {3}, pages = {279 -- 283}, year = {2015}, abstract = {We present an experimental study on fiber laser micromachining of 4H-SiC semiconductor. In particular, we optimize the process time for percussion drilling of 440 µm and 330 µm thick wafers with a minimum drilling time of, eg, 7.5 ms being achieved for 330 µm thick wafers. The drilled holes are characterized by a low taper, a high circularity and entry diameters of about 60 µm. For laser cutting, effective cutting speeds of 2 mm/s and 0.63 mm/s are obtained for 330 µm and 440 µm wafer thickness, respectively, with the cut kerf width being 65 µm. Both processes are associated with a good quality that is characterized by no chipping and cracks. The capability of the fiber laser based micromachining process is highlighted by cutting complex micrometer scale inner and outer contours into partially metallized SiC wafers with high quality.}, subject = {Laserschneiden}, language = {en} } @article{AdelmannHellmann2017, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {Temperature and stress simulation of 4H-SiC during laser-induced silicidation for ohmic contact generation}, series = {Metals}, volume = {2017}, journal = {Metals}, number = {7}, pages = {545 -- 553}, year = {2017}, subject = {Ohm-Kontakt}, language = {en} } @article{AdelmannHellmann2017, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {A study of SiC decomposition under laser irradiation}, series = {Applied Physics A}, volume = {2017}, journal = {Applied Physics A}, number = {123}, pages = {454 -- 452}, year = {2017}, subject = {Laserbestrahlung}, language = {en} } @article{AdelmannHellmann2016, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {Numerical and experimental study on flexural strength of laser microstructured alumina}, series = {Advances in Ceramic Science and Engineering}, volume = {2016}, journal = {Advances in Ceramic Science and Engineering}, number = {5}, pages = {28 -- 34}, year = {2016}, subject = {Faserlaser}, language = {en} } @article{AdelmannHellmann2016, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {SiC absorption of near-infrared laser radiation at high temperatures}, series = {Applied Physics A}, volume = {2016}, journal = {Applied Physics A}, number = {122}, pages = {1 -- 7}, year = {2016}, subject = {Laserbestrahlung}, language = {en} } @article{Adelmann2015, author = {Adelmann, Benedikt}, title = {Fiber laser cutting of aumina substrates for electronic applications - comparison of the experimentally determined and simulated influence on the mechanical strength}, series = {Journal of Electrical Engineering}, volume = {2015}, journal = {Journal of Electrical Engineering}, number = {3}, pages = {111 -- 119}, year = {2015}, subject = {Laserschneiden}, language = {en} } @inproceedings{AdelmannHellmann2015, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {Comparative study of experimentally determined and simulated mechanical strength of fiber laser cut alumina substrates}, series = {Proceedings of the 7th International Congress on Laser Advanced Materials Processing}, volume = {2015}, booktitle = {Proceedings of the 7th International Congress on Laser Advanced Materials Processing}, number = {15}, pages = {1 -- 9}, year = {2015}, subject = {Laserschneiden}, language = {en} } @inproceedings{Adelmann2015, author = {Adelmann, Benedikt}, title = {Substrate thinning of SiC semiconductor components using fiber laser}, series = {Proceedings of the 7th International Congress on Laser Advanced Materials Processing}, booktitle = {Proceedings of the 7th International Congress on Laser Advanced Materials Processing}, number = {15}, year = {2015}, subject = {Faserlaser}, language = {en} } @article{AdelmannRothHellmann2015, author = {Adelmann, Benedikt and Roth, Gian-Luca and Hellmann, Ralf}, title = {Back side ablation of SiC diodes using a q-switched NIR laser}, series = {Journal of Laser Micro/Nanoengineering}, volume = {10}, journal = {Journal of Laser Micro/Nanoengineering}, pages = {190 -- 194}, year = {2015}, subject = {Halbleiterdiode}, language = {en} } @article{AdelmannHellmann2015, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {Rapid micro hole laser drilling in ceramic substrates using single mode fiber laser}, series = {Journal of Materials Processing Technology}, volume = {2015}, journal = {Journal of Materials Processing Technology}, number = {221}, pages = {80 -- 86}, year = {2015}, subject = {Laserbohren}, language = {en} } @article{PreuschAdelmannHellmann2014, author = {Preusch, Florian and Adelmann, Benedikt and Hellmann, Ralf}, title = {Micromachining of AlN and Al2O3 using fiber laser}, series = {Micromachines}, volume = {2014}, journal = {Micromachines}, number = {5}, pages = {1051 -- 1060}, year = {2014}, subject = {Faserlaser}, language = {en} } @article{AdelmannHellmann2014, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {Investigation on flexural strength changes of alumina caused by cutting using fiber laser}, series = {Journal of Laser Micro/Nanoengineering}, volume = {9}, journal = {Journal of Laser Micro/Nanoengineering}, pages = {153 -- 160}, year = {2014}, subject = {Laserschneiden}, language = {en} } @article{AdelmannNgoHellmann2015, author = {Adelmann, Benedikt and Ngo, Chan and Hellmann, Ralf}, title = {High aspect ratio cutting of metals using water jet guided laser}, series = {The International Journal of Advanced Manufacturing Technology}, volume = {2015}, journal = {The International Journal of Advanced Manufacturing Technology}, number = {80}, pages = {2053 -- 2060}, year = {2015}, subject = {Laserschneiden}, language = {en} } @article{SchleierAdelmannEsenetal.2017, author = {Schleier, Max and Adelmann, Benedikt and Esen, Cemal and Hellmann, Ralf}, title = {Cross-correlation-based algorithm for monitoring laser cutting with high-power fiber lasers}, series = {IEEE Sensors Journal}, volume = {18}, journal = {IEEE Sensors Journal}, number = {4}, doi = {10.1109/JSEN.2017.2783761}, pages = {1585 -- 1590}, year = {2017}, subject = {Laserschneiden}, language = {en} } @article{SchleierAdelmannEsenetal.2022, author = {Schleier, Max and Adelmann, Benedikt and Esen, Cemal and Hellmann, Ralf}, title = {Image Processing Algorithm for In Situ Monitoring Fiber Laser Remote Cutting by a High-Speed Camera}, series = {Sensors}, volume = {22}, journal = {Sensors}, number = {8}, publisher = {MDPI AG}, issn = {1424-8220}, doi = {10.3390/s22082863}, year = {2022}, abstract = {We present an in situ process monitoring approach for remote fiber laser cutting, which is based on evaluating images from a high-speed camera. A specifically designed image processing algorithm allows the distinction between complete and incomplete cuts by analyzing spectral and geometric information of the melt pool from the captured images of the high-speed camera. The camera-based monitoring system itself is fit to a conventional laser deflection unit for use with high-power fiber lasers, with the optical detection path being coaxially aligned to the incident laser. Without external illumination, the radiation of the melt from the process zone is recorded in the visible spectral range from the top view and spatially and temporally resolved. The melt pool size and emitted sparks are evaluated in dependence of machining parameters such as feed rate, cycles, and focus position during cutting electrical sheets.}, subject = {Laserschneiden}, language = {en} }