@inproceedings{KeferPapeSchmaussetal.2023, author = {Kefer, Stefan and Pape, Natalie and Schmauss, Bernhard and Hellmann, Ralf}, title = {Fabrication of Lattice-Like Waveguides in Planar Cyclic Olefin Copolymers}, series = {28th International Conference on Optical Fiber Sensors}, booktitle = {28th International Conference on Optical Fiber Sensors}, isbn = {978-1-957171-30-2}, doi = {10.1364/OFS.2023.Th6.69}, year = {2023}, abstract = {This work demonstrates the femtosecond laser-based fabrication of lattice-like waveguides in planar cyclic olefin copolymers. An overview of the fabrication process is provided and waveguiding in the C-band is proven via optical near-field analysis.}, subject = {Wellenleiter}, language = {en} } @inproceedings{KeferZettlSchmaussetal.2023, author = {Kefer, Stefan and Zettl, Julian and Schmauss, Bernhard and Esen, Cemal and Hellmann, Ralf}, title = {High-Precision Micromachining of Sapphire Towards Optical Waveguiding Structures using Femtosecond Lasers}, series = {Laser-based Micro- and Nanoprocessing XVII}, booktitle = {Laser-based Micro- and Nanoprocessing XVII}, editor = {Kling, Rainer and Pfleging, Wilhelm and Watanabe, Akira}, isbn = {9781510659230}, doi = {10.1117/12.2648758}, pages = {3 -- 11}, year = {2023}, abstract = {While sapphire is one of the most durable materials, its properties entail that high-precision machining, especially in the sub-millimeter regime, is still challenging. This contribution demonstrates and discusses novel femtosecond laser-based micromachining approaches for the fabrication of rotational-symmetric sapphire workpieces, specifically the generation of optical fibers by means of laser lathe of sapphire rods and the practical realization of windmill fibers. In addition, volume refractive index modification in planar sapphire substrates is presented to induce photonic crystal waveguides. The micromachined structures are comprehensively examined with respect to geometric fidelity, surface roughness, refractive index modification, and potential optical waveguiding properties. All micromachining approaches are done by means of frequency-doubled or frequency-tripled femtosecond laser radiation. Different laser optical setups including laser scanning head, spatial beam profilers including a spatial light modulator and axial rotatory movement of the specimen are employed for micro structuring and in-depth refractive index modifications. In particular for laser lathe, a sophisticated scanning pattern, in combination with an incremental axial rotatory movement of the specimen, allows for the precise diameter reduction of sapphire rods with 250 µm diameter to fibers with outer diameters of 25 µm. By supporting the workpiece with a V-groove fixture, multi-mode fibers with lengths up to 20 cm can be processed with an average surface roughness of 250 nm. Additionally, an adapted ablation scanning sequence enables the first practical demonstration of sapphire windmill fibers. Furthermore, using a spatial light modulator allows for the adaption of the laser propagation properties as to enable volume refractive index modifications with free-form arrangement. Hexagonal patterns of refractive index modifications surrounding a pristine waveguide core are fabricated and single-mode waveguiding at 1550 nm is verified. Finally, the possibility of integrating Bragg gratings into this photonic waveguide type is demonstrated}, subject = {Femtosekundenlaser}, language = {en} } @article{KeferZettlEsenetal.2022, author = {Kefer, Stefan and Zettl, Julian and Esen, Cemal and Hellmann, Ralf}, title = {Femtosecond Laser-Based Micromachining of Rotational-Symmetric Sapphire Workpieces}, series = {Materials}, volume = {15}, journal = {Materials}, number = {18}, doi = {10.3390/ ma15186233}, pages = {6233 -- 6233}, year = {2022}, abstract = {Sapphire is a robust and wear-resistant material. However, efficient and high-quality micromachining is still a challenge. This contribution demonstrates and discusses two novels, previously unreported approaches for femtosecond laser-based micromachining of rotational-symmetric sapphire workpieces, whereas both methods are in principal hybrids of laser scanning and laser turning or laser lathe. The first process, a combination of a sequential linear hatch pattern in parallel to the workpiece's main axis with a defined incremental workpiece rotation, enables the fabrication of sapphire fibers with diameters of 50 µm over a length of 4.5 mm. Furthermore, sapphire specimens with a diameter of 25 µm over a length of 2 mm can be fabricated whereas an arithmetical mean height, i.e., Sa parameter, of 281 nm is achieved. The second process combines a constant workpiece feed and orthogonal scanning with incremental workpiece rotation. With this approach, workpiece length limitations of the first process are overcome and sapphire fibers with an average diameter of 90 µm over a length of 20 cm are manufactured. Again, the sapphire specimen exhibits a comparable surface roughness with an average Sa value of 249 nm over 20 cm. Based on the obtained results, the proposed manufacturing method paves an innovative and flexible, all laser-based way towards the fabrication or microstructuring of sapphire optical devices, and thus, a promising alternative to chemical processes.}, subject = {Femtosekundenlaser}, language = {en} } @article{Kefer2022, author = {Kefer, Stefan}, title = {Sapphire Photonic Crystal Waveguides with Integrated Bragg Grating Structure}, series = {Photonics}, volume = {9}, journal = {Photonics}, number = {4}, doi = {https://doi.org/10.3390/photonics9040234}, pages = {234 -- 234}, year = {2022}, abstract = {Abstract: This contribution demonstrates photonic crystal waveguides generated within bulk planar sapphire substrates. A femtosecond laser is used to modify the refractive index in a hexagonal pattern around the pristine waveguide core. Near-field measurements reveal single-mode behavior at a wavelength of 1550 nm and the possibility to adapt the mode-field diameter. Based on farfield examinations, the effective refractive index contrast between the pristine waveguide core and depressed cladding is estimated to 3x10-4. Additionally, Bragg gratings are generated within the waveguide core. Due to the inherent birefringence of Al2O3, the gratings exhibit two distinct wavelengths of main reflection. Each reflection peak exhibits a narrow spectral full width at a half maximum of 130 pm and can be selectively addressed by exciting the birefringent waveguide with appropriately polarized light. Furthermore, a waveguide attenuation of 1 dB cm-1 is determined.}, subject = {Wellenleiter}, language = {en} } @article{KeferBischoffRothetal.2021, author = {Kefer, Stefan and Bischoff, Kay and Roth, Gian-Luca and Haubner, Julian and Schmauss, Bernhard and Hellmann, Ralf}, title = {Tunable Bulk Polymer Planar Bragg Gratings Electrified via Femtosecond Laser Reductive Sintering of CuO Nanoparticles}, series = {Advanced Optical Materials}, volume = {9}, journal = {Advanced Optical Materials}, number = {13}, doi = {https://doi.org/10.1002/adom.202002203}, pages = {2002203 -- 2002203}, year = {2021}, abstract = {This contribution demonstrates and discusses electrically tunable polymer planar Bragg gratings based on bulk cyclic olefin copolymers. A lithographic single-writing-step method and femtosecond laser reductive sintering of copper(II) oxide nanoparticles are subsequently employed in order to generate buried photonic structures and copper conducting paths on top of the polymer substrate. This way, the necessary number of process steps for fabricating a planar polymer-based electro-optical device is greatly reduced. The response of a fully electrified grating structure follows temperature changes, induced by the copper conducting path, with sensitivities up to -31 pm K-1. Dilatometric measurements show that the specimen's behavior is correlated to the situationally reduced thermal expansion of the bulk polymer substrate. In consequence, the tuning response of the photonic platform follows a second order polynomial, whereas a direct current of 30 mA, which correlates to a power consumption of 18.3 mW, leads to a local temperature increase and a residual Bragg wavelength shift of 19.6 K and -547 pm, respectively. Moreover, the outstanding flexibility of the proposed fabrication concept is underlined by demonstrating alternative conducting path geometries, whereas one of the additional designs is adapted to control the spectral width of the Bragg grating's reflection peak.}, subject = {Femtosekundenlaser}, language = {en} } @misc{KeferBischoffRothetal.2021, author = {Kefer, Stefan and Bischoff, Kay and Roth, Gian-Luca and Haubner, Julian and Schmauss, Bernhard and Hellmann, Ralf}, title = {Tunable Bulk Polymer Planar Bragg Gratings Electrified via Femtosecond Laser Reductive Sintering of CuO Nanoparticles (Advanced Optical Materials 13/2021)}, doi = {https://doi.org/10.1002/adom.202170048}, year = {2021}, abstract = {This cover image outlines the fabrication method of a polymer planar Bragg grating electrified via femtosecond laser reductive sintering of CuO nanoparticles (see article number 2002203 by Stefan Kefer and co-workers). Based on this sophisticated methodology, bulk cyclic olefin copolymer substrates can be equipped with integrated photonic structures comprising a waveguide as well as a Bragg grating. Its reflective characteristics can be efficiently tuned by means of the subsequently generated Cu conducting path, whereas the applied femtosecond laser process enables an almost limitless degree of freedom towards conducting path geometries.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothKeferHessleretal.2021, author = {Roth, Gian-Luca and Kefer, Stefan and Hessler, Steffen and Esen, Cemal and Hellmann, Ralf}, title = {Integration of Microfluidic and Photonic Components within Transparent Cyclic Olefin Copolymers by Using fs Laser}, series = {Journal of Laser Micro/Nanoengineering}, volume = {16}, journal = {Journal of Laser Micro/Nanoengineering}, number = {1}, doi = {10.2961/jlmn.2021.01.2009}, pages = {1 -- 6}, year = {2021}, abstract = {In this study, we report on the integration of microfluidic channels and optical components by focusing femtosecond laser radiation inside transparent cyclic olefin copolymer (COC) bulk material. An internal localized material modification is triggered based on nonlinear absorption of the laser radiation's high intensities inside the focal volume. The size and shape of the three-dimensional internal modification are controlled by using an adaptive beam shaping setup. The irradiated areas show a positive refractive index shift and can be used as Type I internal optical waveguides. Furthermore, precise control of the spatial pulse-to-pulse distance in combination with a suitable beam profile enables the integration of functional photonic elements, e.g., Bragg gratings, into the waveguide. Thus, it also enables the generation of integrated photonic sensors. In addition, internal fs laser-induced modifications are characterized by a lower thermal stability as compared to the pristine polymer material. By performing a post-annealing process step, internal hollow microstructures are created by gaseous degradation of the exposed areas. Circular microchannels can be generated in a deliberately chosen layout by employing motorized 3D stages. In comparison to etching-based fabrication methods the proposed technology facilitates unlimited channel lengths, as it omits restrictions arising from an etching selectivity and duration. Altogether, this contribution paves the way towards the fabrication of internal three-dimensional optofluidic devices, equipped with a photonic sensor. In contrast, microfluidic and photonic structures are both created by femtosecond laser direct writing inside of transparent polymers.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothHaubnerKeferetal.2020, author = {Roth, Gian-Luca and Haubner, Julian and Kefer, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Fs-laser based hybrid micromachining for polymer micro-opto electrical systems}, series = {Optics and Lasers in Engineering}, volume = {137}, journal = {Optics and Lasers in Engineering}, number = {10362}, doi = {10.1016/j.optlaseng.2020.106362}, pages = {1 -- 8}, year = {2020}, abstract = {We report on femtosecond laser direct writing of electrically conductive copper structures on transparent cyclic olefin copolymer based planar optical chips. The process is based on a laser-induced reduction of CuO nanoparticles dissolved in a water-soluble resin. Thus generated conductive copper structures are characterized with respect to their chemical composition and electrical resistivity. In addition, the application of ultrashort laser pulses enables a hybrid micromachining approach comprising ablation of polymer substrates and the fabrication of copper patterns in a single laser processing setup. A possible electro-optical application of this approach is demonstrated by employing the copper structures as an electro-thermal microheater in combination with a polymer planar optical Bragg grating sensor. This, in turn, highlights the potential of generating copious micro-opto-electro-mechanical polymer structures for numerous sensing applications ranging from Lab-on-Chip to environmental applications using the presented hybrid micromachining approach.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothHesslerKeferetal.2020, author = {Roth, Gian-Luca and Hessler, Steffen and Kefer, Stefan and Girschikofsky, Maiko and Esen, Cemal and Hellmann, Ralf}, title = {Femtosecond laser inscription of waveguides and Bragg gratings in transparent cyclic olefin copolymers}, series = {Optics Express}, volume = {28}, journal = {Optics Express}, number = {12}, doi = {10.1364/OE.388364}, pages = {18077 -- 18084}, year = {2020}, abstract = {We report on a femtosecond laser based fabrication technique that enables simultaneous single-step generation of optical waveguides and Bragg gratings inside bulk cyclic olefin copolymers. Due to the nonlinear absorption of focused and spatially modulated laser radiation with a wavelength of 514 nm and a pulse duration of 450 fs, a modification concluding a refractive index shift increase inside the substrate can be achieved. A sophisticated characterization of the generated waveguides by means of an elaborate cut-back method reveals a maximum attenuation of 3.2 dB/cm. Additionally, a Mach-Zehnder interferometer is used to examine the waveguide's refractive index profile. The integrated Bragg grating structures exhibit reflectivities up to 95 \% and a spectral full width at half maximum of 288 pm, at a Bragg wavelength of 1582 nm, whereas the grating period can be deliberately chosen by adapting the fabrication parameters. Thus, due to its increased flexibility and the resulting dispensability of cost-intensive phase masks, this method constitutes an especially promising fabrication process for polymer Bragg gratings inside of bulk materials.}, subject = {Femtosekundenlaser}, language = {en} }