@article{RothRungEsenetal.2020, author = {Roth, Gian-Luca and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Microchannels inside bulk PMMA generated by femtosecond laser using adaptive beam shaping}, series = {Optics Express}, volume = {28}, journal = {Optics Express}, number = {4}, pages = {5801 -- 5811}, year = {2020}, abstract = {In this contribution, we report on the generation of internal microchannels with basically unlimited channel length inside of PMMA bulk material by femtosecond laser. A precisely controllable and stable circular channel cross section is obtained by using a spatial light modulator to compensate the writing depth depending spherical aberration. Furthermore, the generation of a rotatable elliptical input beam by adaptive optics ensures a fitting of the beam shaping to the writing direction. In this study, we report on both, the effect of the ellipticity of the input beam and the effect of a correction of the spherical aberration on the circularity of the resulting internal microchannels. Moreover, we demonstrate the application of this writing technique by creating microfluidic testing structures inside of a transparent standard polymer.}, subject = {Femtosekundenlaser}, language = {en} } @article{RothEsenHellmann2018, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Vertical Microchannels for Microfluidic Multilayer Interconnections in PMMA}, series = {Journal of Laser Micro/Nanoengineering}, volume = {13}, journal = {Journal of Laser Micro/Nanoengineering}, number = {3}, pages = {155 -- 159}, year = {2018}, abstract = {We report on laser generation of microchannels by focused femtosecond laser pulses inside PMMA bulk material. This process enables direct fabrication of three dimensional microfluidic channel architectures with generally unlimited channel length. Based on nonlinear ultrashort pulse laser absorption of high intensities around the focal volume, a material modification including a refractive index shift is triggered. After laser exposure the channel is created by a gaseous degradation of exposed areas during an annealing process. The 3D channel layout can easily be realized by moving the specimen using 3D motorized stages, allowing freely chosen complex shaped channel architectures. In this report, the creation of inner lying vertical microchannels is examined. In addition to previously shown horizontal channel architectures vertical channels are necessary to fulfill the definition of an internal three-dimensional microfluidic structure and to create interconnections in multilevel lab on chip devices. The cross section and geometry of vertical channels are strongly influenced by laser parameters such as pulse duration, laser power and writing speed. The influence of these process parameters on the channels diameter is determined and parameters are optimized regarding a controllable, stable and reproducible process. The functionality of vertical microchannels as an interconnection between multilayer microfluidic devices is demonstrated using a Rhodamine B solution.}, subject = {Polymethylmethacrylate}, language = {en} } @article{RothEsenHellmann2018, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Control of femtosecond laser generated microfluidic channels inside poly (methyl methacrylate)}, series = {Journal of Laser Applications}, volume = {30}, journal = {Journal of Laser Applications}, number = {3}, pages = {032016-1 -- 032016-6}, year = {2018}, abstract = {In this study, the authors report on femtosecond laser direct generation of microchannels inside poly(methyl methacrylate) with variable dimensions ranging from a channel height of 20 to 350 μm and an aspect ratio down to 1.2. Focused ultrashort laser pulses are used to trigger a material modification in the focal area which can be selectively opened by a subsequent annealing process. A 3D microchannel architecture can easily be realized by moving the specimen using motorized stages, allowing freely chosen complex shaped channel layouts. While the laser wavelength is identified as one of the main parameters determining process effectiveness, another core of this study is the variation of channel dimensions by the numerical aperture of the applied objective to focus the laser. The authors find that both size and shape of the modified region and the resulting microchannel can be controlled by altering the numerical aperture.}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{EmmerichThielemann2015, author = {Emmerich, Florian and Thielemann, Christiane}, title = {Patterning of PMMA by gold-nanoparticle initiated localized decomposition}, series = {2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Changchun, China}, booktitle = {2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Changchun, China}, doi = {10.1109/3M-NANO.2015.7425480}, year = {2015}, abstract = {The need for manipulating matter at its smallest scale has been a hot topic in research for the last decades. As the final goal of arranging single atoms has been achieved, research focuses on two targets: firstly, improving the capabilities of existing technologies towards nanometer resolution and secondly, finding new methods for producing nanostructures in a fast and easy way. Here, we present a new maskless method for sub-micro-patterning of poly(methyl methacrylate) (PMMA) thin films. By applying atomic-force-microscope (AFM) assisted nano-xerography, electric charges were locally injected with an AFM-tip into PMMA. The resulting electrostatic patterns attracted charged gold-nanoparticles, which were selectively deposited onto the PMMA layers with lateral dimensions below 200 nm. In a second step, heat treatment at 275 °C initiated a selective decomposition of the PMMA layer, only observed in PMMA-areas covered with nanoparticles, whereas uncovered areas were not modified by the heat treatment. Analyzing the grooves with the AFM, we found that lines with a width in the sub-micrometer range to several micrometers have successfully been realized. We propose this new and promising method to manufacture nano-grooves used as masking for lift-off processes, for functionalization of underlying areas, or for micro-contact-printing.}, subject = {Polymethylmethacrylate}, language = {en} }