@inproceedings{FranzRothRungetal.2021, author = {Franz, Daniel and Roth, Gian-Luca and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Superimposed beam deflection using acousto-optical deflectors in combination with a galvanometer scanner}, series = {Lasers in Manufacturing - LiM 2021}, booktitle = {Lasers in Manufacturing - LiM 2021}, year = {2021}, subject = {Galvanometer}, language = {en} }