@inproceedings{RungRexhepiHellmann2013, author = {Rung, Stefan and Rexhepi, Mal and Hellmann, Ralf}, title = {Beam shaping for enhanced through-put of laser ablation of transparent conductive films}, series = {Proceedings of the XXVII MicroCAD International Scientific Conference}, volume = {2013}, booktitle = {Proceedings of the XXVII MicroCAD International Scientific Conference}, year = {2013}, subject = {Laserablation}, language = {en} } @inproceedings{AdelmannNeumeierSchleieretal.2015, author = {Adelmann, Benedikt and Neumeier, Benedikt and Schleier, Max and Wilmann, Eugen and Hellmann, Ralf}, title = {Optical cutting tear detection system for industrial fiber laser based cutting machines}, series = {Lasers in Manufacturing Conference 2015}, booktitle = {Lasers in Manufacturing Conference 2015}, year = {2015}, subject = {Laserschneiden}, language = {en} } @inproceedings{AdelmannHellmann2015, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {Comparative study of experimentally determined and simulated mechanical strength of fiber laser cut alumina substrates}, series = {Proceedings of the 7th International Congress on Laser Advanced Materials Processing}, volume = {2015}, booktitle = {Proceedings of the 7th International Congress on Laser Advanced Materials Processing}, number = {15}, pages = {1 -- 9}, year = {2015}, subject = {Laserschneiden}, language = {en} } @inproceedings{RothEsenHellmann2020, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Internal micro structuring of transparent optical polymers by fs laser}, series = {Laser-based Micro-and Nanoprocessing XIV 2020}, volume = {11268}, booktitle = {Laser-based Micro-and Nanoprocessing XIV 2020}, publisher = {International Society for Optics and Photonics}, doi = {10.1117/12.2543487}, pages = {112681L}, year = {2020}, abstract = {Lab-on-chip systems are based on components to transport, mix, separate and analyse small volumes of different fluids. The consecutive integration of more complex functions into a single and compact chip demands on multilayer systems. As the classical production using a stacking and joining of single processed layers is elaborate and limited in terms of multilayer structures, an uprising trend to fabricate those devices is the internal, three dimensional processing of transparent substrates by using ultrashort laser pulses. In this study, we report on the generation of internal hollow architectures created by focused 514nm femtosecond laser pulses inside optical polymer bulk materials of different polymers. The three-dimensional channel layout is implemented by moving the sample using three-dimensional motorized stages, allowing arbitrary complex shaped internal channel architectures. Size and cross sectional shape of a single internal generated microchannel are determined by the intensity distribution of the focal voxel. In particular, we show a comprehensive parameter study to improve this laser process with respect to a higher processing speed and stability.}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{DudutisPipirasSchwarzetal.2019, author = {Dudutis, Juozas and Pipiras, Jokūbas and Schwarz, Simon and Rung, Stefan and Hellmann, Ralf and Račiukaitis, Gediminas and Gečys, Paulius}, title = {Glass cutting by oblate-tip axicon-generated Bessel-Gaussian beams}, series = {Open Readings, 63rd International Conference for Students of Physics and Natural Sciences}, booktitle = {Open Readings, 63rd International Conference for Students of Physics and Natural Sciences}, year = {2019}, subject = {Laserschneiden}, language = {en} } @inproceedings{SchwarzRungHellmann2016, author = {Schwarz, Simon and Rung, Stefan and Hellmann, Ralf}, title = {Simulation of process parameters towards the generation of low spatial frequency LIPSS on dielectric materials}, series = {MultiScience - XXX. microCAD International Multidisciplinary Scientific Conference}, booktitle = {MultiScience - XXX. microCAD International Multidisciplinary Scientific Conference}, year = {2016}, subject = {Laserbestrahlung}, language = {en} } @inproceedings{LutzSchwarzRungetal.2021, author = {Lutz, Christian and Schwarz, Simon and Rung, Stefan and Marx, Jan and Esen, Cemal and Hellmann, Ralf}, title = {Optical system for multi Bessel beam high power ultrashort pulsed laser processing using a spatial light modulator}, series = {Lasers in Manufacturing - LiM 2021}, booktitle = {Lasers in Manufacturing - LiM 2021}, year = {2021}, abstract = {We report on an optical setup for multi Bessel beam processing combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams exhibit various advantages over conventional Gaussian beams for ultrashort pulsed laser processing. Especially for micromachining of transparent materials, applications such as micro-hole drilling or the generation of voids benefit from the increased focal length of the applied Bessel beam. In addition, on account of the significantly increased average output power of industrial ultrashort pulsed lasers over the last years, there is a high demand on multi spot applications for using the available laser power in efficient production processes. Our optical concept combines the dynamic possibilities of beam splitting using spatial light modulator with the benefits of Bessel beams facilitating multi Bessel beam processing.}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{FranzRothRungetal.2021, author = {Franz, Daniel and Roth, Gian-Luca and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Superimposed beam deflection using acousto-optical deflectors in combination with a galvanometer scanner}, series = {Lasers in Manufacturing - LiM 2021}, booktitle = {Lasers in Manufacturing - LiM 2021}, year = {2021}, subject = {Galvanometer}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Manufacturing of optical elements by non-contact laser processing}, series = {Seventh European Seminar on Precision Optics Manufacturing, Proceedings}, booktitle = {Seventh European Seminar on Precision Optics Manufacturing, Proceedings}, number = {11478}, year = {2020}, subject = {Laserbearbeitung}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {UKP-Prozess mit anschließendem CO2-Laserpolieren zur Fertigung komplexer Optiken}, series = {10. Workshop Laserbearbeitung von Glaswerkstoffen}, booktitle = {10. Workshop Laserbearbeitung von Glaswerkstoffen}, year = {2020}, subject = {Linse}, language = {en} } @inproceedings{SchwarzRungHellmann2017, author = {Schwarz, Simon and Rung, Stefan and Hellmann, Ralf}, title = {High quality one-dimensional low spatial frequency LIPSS on sapphire generated by Top-Hat beam shaped ultrashort-pulsed laser}, series = {MultiScience - XXXI. microCAD International Multidisciplinary Scientific Conference}, booktitle = {MultiScience - XXXI. microCAD International Multidisciplinary Scientific Conference}, year = {2017}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {All laser-based fabrication of optical elements}, series = {Proceedings of SPIE 11270, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX}, booktitle = {Proceedings of SPIE 11270, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX}, year = {2020}, subject = {Ultrakurzzeitlaser}, language = {de} } @inproceedings{MarxEsenLutzetal.2023, author = {Marx, Jan and Esen, Cemal and Lutz, Christian and Hellmann, Ralf and Ostendorf, Andreas}, title = {Holographic tuning of physical axicons}, volume = {2023}, number = {154}, publisher = {LiM 2023 Proceedings}, pages = {1 -- 9}, year = {2023}, abstract = {Axicon generated Bessel beams are a popular tool for high aspect ratio precision laser drilling. Spot diameter and working distance are given by the geometric parameters of the axicon and the wavelength used. Thus, it is difficult to manipulate the beam shape of a Bessel beam for a given setup. Spatial light modulators (SLMs) overcome limitations in flexibility. However, due to the limited phase shift of SLMs, only Bessel beams with flat cone angles and large focal length can be generated. In this contribution, an approach for generating Bessel beams with a shorter, but tunable focal length is presented. A physical axicon was combined with an SLM. A holographic image of a negative axicon is put on the SLM to generate a ring beam, which is focused by a subsequent physical axicon to get a small focal diameter. Thus, different sized high aspect ratio micro holes can be drilled without using any moving components.}, subject = {Bessel-B{\"u}ndel}, language = {en} } @inproceedings{KalmarHellmannRegertetal.2012, author = {Kalm{\´a}r, L{\´a}szl{\´o} and Hellmann, Ralf and R{\´e}gert, Tam{\´a}s and Varga, Zoltan}, title = {Numerical investigation of unsteady heat transport procedure in high power LED module}, series = {GEP}, volume = {2012}, booktitle = {GEP}, number = {1}, pages = {43 -- 46}, year = {2012}, subject = {Lumineszenzdiode}, language = {en} } @inproceedings{GirschikofskyRosenbergerBelleetal.2012, author = {Girschikofsky, Maiko and Rosenberger, Manuel and Belle, Stefan and Brutschy, Malte and Waldvogel, Siegfried and Hellmann, Ralf}, title = {α-Cyclodextrin functionalized planar Bragg grating sensor for the detection of small arene traces in solvamt vapour}, series = {14th international meeting on chemical sensors (IMCS 2012)}, booktitle = {14th international meeting on chemical sensors (IMCS 2012)}, isbn = {978-3-9813484-2-2}, doi = {10.5162/IMCS2012/7.5.1}, pages = {646 -- 648}, year = {2012}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{KollerHesslerRosenbergeretal.2012, author = {Koller, Georg and Hessler, Steffen and Rosenberger, Manuel and Belle, Stefan and Hellmann, Ralf}, title = {Micro-structured optical waveguide fabrication in PMMA using low frequency reactive ion etching}, series = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, booktitle = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, year = {2012}, subject = {Wellenleiter}, language = {en} } @inproceedings{GirschikofskyRosenbergerBelleetal.2012, author = {Girschikofsky, Maiko and Rosenberger, Manuel and Belle, Stefan and Hellmann, Ralf}, title = {Surface modifications of planar bragg grating refractive index sensors for gas detection}, series = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, booktitle = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, year = {2012}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{BischoffJaegerRungetal.2012, author = {Bischoff, Christian and J{\"a}ger, Erwin and Rung, Stefan and Hellmann, Ralf}, title = {Diffractive beam shaping optics for efficient micromachining}, series = {Proceedings of the LASYS (Internationale Fachmesse f{\"u}r Laser-Materialbearbeitung) - SLT (Stuttgarter Lasertage) 2012}, booktitle = {Proceedings of the LASYS (Internationale Fachmesse f{\"u}r Laser-Materialbearbeitung) - SLT (Stuttgarter Lasertage) 2012}, year = {2012}, subject = {Laserbearbeitung}, language = {en} } @inproceedings{KalmarHellmannRegertetal.2012, author = {Kalm{\´a}r, L{\´a}szl{\´o} and Hellmann, Ralf and R{\´e}gert, Tam{\´a}s and Varga, Zoltan}, title = {Numerical investigation of heat transport procedure in high power LED modules}, series = {Proceedings of the XXVI International MicroCAD Conference, Miskolc (Hungary)}, booktitle = {Proceedings of the XXVI International MicroCAD Conference, Miskolc (Hungary)}, pages = {43 -- 46}, year = {2012}, subject = {Lumineszenzdiode}, language = {en} } @inproceedings{RungHellmann2012, author = {Rung, Stefan and Hellmann, Ralf}, title = {Laser scribing of metallized transparent conductive oxide - A comparative study using top hat and Gaussian beam profiles}, series = {Proceedings of the XXVI International MicroCAD Conference - Material Processing Technologies}, booktitle = {Proceedings of the XXVI International MicroCAD Conference - Material Processing Technologies}, year = {2012}, subject = {Laserbearbeitung}, language = {en} }