@inproceedings{GirschikofskyRosenbergerBelleetal.2012, author = {Girschikofsky, Maiko and Rosenberger, Manuel and Belle, Stefan and Brutschy, Malte and Waldvogel, Siegfried and Hellmann, Ralf}, title = {α-Cyclodextrin functionalized planar Bragg grating sensor for the detection of small arene traces in solvamt vapour}, series = {14th international meeting on chemical sensors (IMCS 2012)}, booktitle = {14th international meeting on chemical sensors (IMCS 2012)}, isbn = {978-3-9813484-2-2}, doi = {10.5162/IMCS2012/7.5.1}, pages = {646 -- 648}, year = {2012}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{HeilmannHellmann2011, author = {Heilmann, Eva-Maria and Hellmann, Ralf}, title = {Water jet guided laser cutting using a green disc laser}, series = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, booktitle = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, year = {2011}, subject = {Wasserstrahlschneiden}, language = {en} } @inproceedings{BischoffMueckeEsenetal.2023, author = {Bischoff, Kay and M{\"u}cke, Dominik and Esen, Cemal and Hellmann, Ralf}, title = {UV-Femtosecond-Laser Structuring of Silicon Carbide}, series = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, abstract = {We report on ultraviolet ultrashort pulsed laser processing of silicon carbide. Laser ablated cavities are evaluated with respect to their ablation rates, surface roughness and overall quality by varying the laser pulse fluence. Using this type of laser, high edge quality and surface roughness down to 107 nm can be achieved with an ablation efficiency of up to 0.228 mm 3 W -1 min -1. Functional surfaces are produced by generating laser induced periodic surface structures. The comparison with infrared wavelength underlines the advantages of the ultraviolet wavelength for laser micro machining this material. Significant differences with respect to the measured ablation depths and roughness as well as generated micro-and nanostructures appear. While infrared ablation is dominated by a chipping mechanism above a critical fluence of 9.93 Jcm -2 , higher ablation rates are observed with strong quality losses at the same time. In comparison to the infrared emission wavelength, in general , a significantly higher processing quality is achieved with the ultraviolet emission wavelength. In addition, the influence of spot size and repetition rate in UV processing is investigated. By increasing these parameters, a process acceleration without quality losses is enabled. The generation of a sophisticated microstructure exemplifies the advantages of processing silicon carbide with the UV laser reported here.}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{FranzMueckeKunzetal.2023, author = {Franz, Daniel and M{\"u}cke, Dominik and Kunz, Tim and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {UV picosecond laser drilling of ABF film material for printed circuit boards using laser burst mode and beam shaping}, series = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, abstract = {We report on an experimental study of laser microvia percussion drilling of Ajinomoto build-up film (ABF) material using an ultrashort pulsed laser in the ultraviolet region. In order to optimize the drilling quality in terms of the fabricated taper and microvia diameter, the MHz burst mode is used in combination with both a Gaussian and a top-hat laser intensity distribution. To evaluate the influence of the top-hat beam shape on defocusing, microvias were drilled at different z-positions in the range of 200 μm evenly distributed around the focal plane. The drilling quality was evaluated by laser scanning microscopy and metallography. When using a top-hat beam shape, a reduced taper of down to 26.8 \% on average is achieved compared to a Gaussian beam. For the application of 3 intra-burst pulses, we find an improvement of the taper by 11.6\% compared to the single pulse mode due to the increasing heat accumulation. Using a top-hat beam shape in combination with the MHz burst mode, an 18.2 \% reduction in laser drilling time for a microvia with a similar taper is remarkable, demonstrating the high potential for scaling throughput in electronics manufacturing.}, subject = {Pikosekundenbereich}, language = {en} } @inproceedings{FranzSchusterSchwarzetal.2025, author = {Franz, Daniel and Schuster, David and Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Ultrashort pulsed laser drilling of through-glass vias for glass core packaging}, series = {Proceedings of LAMP2025 - the 9th International Congress on Laser Advanced Materials Processing, Ise-City, Japan, June 2025}, booktitle = {Proceedings of LAMP2025 - the 9th International Congress on Laser Advanced Materials Processing, Ise-City, Japan, June 2025}, year = {2025}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {UKP-Prozess mit anschließendem CO2-Laserpolieren zur Fertigung komplexer Optiken}, series = {10. Workshop Laserbearbeitung von Glaswerkstoffen}, booktitle = {10. Workshop Laserbearbeitung von Glaswerkstoffen}, year = {2020}, subject = {Linse}, language = {en} } @inproceedings{LutzSommerhuberKettneretal.2024, author = {Lutz, Christian and Sommerhuber, Ryan and Kettner, Matthias and Esen, Cemal and Hellmann, Ralf}, title = {Towards process control by detecting acoustic emissions during ultrashort pulsed laser ablation of multilayer materials}, series = {Laser-based Micro- and Nanoprocessing XVIII}, booktitle = {Laser-based Micro- and Nanoprocessing XVIII}, editor = {Kling, Rainer and Pfleging, Wilhelm and Sugioka, Koji}, publisher = {SPIE}, doi = {10.1117/12.3000954}, year = {2024}, abstract = {We report on process sensing using a membrane-free optical microphone to monitor the acoustic emission during ultrashort pulsed laser ablation of multilayer materials. The acoustic emission during ablation is used to detect material transitions, with the specific signatures allowing to create a reliable process control for identifying individual layers. The outstanding properties of membrane-free optical microphones in terms of high bandwidth and high temporal resolution are ideally qualified for characterizing an ultrashort pulsed laser process, with its properties and capabilities being presented in this contribution. In particular, for layer- and material-selective ablation of multilayer printed circuit board components, copper and polyimide layers are ablated and the material transition is detected by analyzing the acoustic signal at different frequency levels, which is a novelty in the field of ultrashort pulsed laser process sensing. The investigations show, that the optical microphone can be used to resolve both the scanning paths and ablated layers by means of interruptions in a time-resolved acoustic spectrogram. Furthermore, as a result of a higher ablation rate of polyimide compared to copper and thus the increase of the emitted acoustic energy, the material transition between copper and polyimide layers can clearly be detected. The detection of this process event can be used for process control.}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{KeferPapeGriesetal.2023, author = {Kefer, Stefan and Pape, Natalie and Gries, Nikola and Roth, Gian-Luca and Schmauss, Bernhard and Hellmann, Ralf}, title = {Towards Pressure Sensors Based on Polymer Planar Bragg Gratings}, series = {Organic Photonic Materials and Devices XXV}, booktitle = {Organic Photonic Materials and Devices XXV}, isbn = {9781510659414}, doi = {10.1117/12.2648723}, year = {2023}, abstract = {While Bragg grating-based optical devices have shown promising performances for pressure sensing applications, their sensitivity, especially in the low-pressure regime, is unsatisfying and needs to be optimized by elaborate designs, such as cantilevers or other extrinsic mechanical transducers. This contribution demonstrates and discusses a novel concept for optical pressure sensors based on polymer planar Bragg gratings. Waveguide and Bragg grating are fabricated underneath the surface of a temperature-stable and humidity-insensitive cyclic olefin copolymer substrate by means of a femtosecond laser. Based on the employed direct-writing procedure, in combination with adaptive, in-situ beam shaping with a spatial light modulator, writing depth, i.e., location of the photonic structures within the substrate, as well as Bragg grating periodicity and positioning can be deliberately chosen. Afterwards, the polymer substrate is post-processed with a high-precision micro mill, so a diaphragm comprising the integrated photonic structures is generated. The resulting diaphragm exhibits a thickness of 300 µm and a diameter of 10 mm. Finally, the optical sensor is packaged and sealed to form an air-filled gas pocket underneath the diaphragm. Deformations of the diaphragm by external pressure changes translate to strain variations along the waveguide axis and thus perturb the Bragg grating period. This leads to changes in the grating's wavelength of main reflection, which can be evaluated in order to quantify the relative external pressure. With this straightforward optical sensor concept, pressure sensitivities up to 39 pm kPa-1, within relative pressures ranges from 78 kPa to 372 kPa, are achieved.}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{BischoffKeferEsenetal.2024, author = {Bischoff, Kay and Kefer, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Towards entirely ultrashort pulsed laser based process chain to manufacture polymer lab-on-chip systems with electrical, photonic, and microfluidic functionalities}, series = {The 5th Smart Laser Processing Conference (SLPC)}, booktitle = {The 5th Smart Laser Processing Conference (SLPC)}, year = {2024}, subject = {Ultrakurzzeitlaser}, language = {de} } @inproceedings{GirschikofskyRosenbergerBelleetal.2012, author = {Girschikofsky, Maiko and Rosenberger, Manuel and Belle, Stefan and Hellmann, Ralf}, title = {Surface modifications of planar bragg grating refractive index sensors for gas detection}, series = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, booktitle = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, year = {2012}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{FranzRothRungetal.2021, author = {Franz, Daniel and Roth, Gian-Luca and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Superimposed beam deflection using acousto-optical deflectors in combination with a galvanometer scanner}, series = {Lasers in Manufacturing - LiM 2021}, booktitle = {Lasers in Manufacturing - LiM 2021}, year = {2021}, subject = {Galvanometer}, language = {en} } @inproceedings{GlaabHellmann2010, author = {Glaab, Johannes and Hellmann, Ralf}, title = {Small-scale low-through UV-C LED disinfection device, in waste processing and recycling}, series = {Proceedings of the XXIV international Scientific conference Miskolc, Ungarn}, booktitle = {Proceedings of the XXIV international Scientific conference Miskolc, Ungarn}, year = {2010}, subject = {Lumineszenzdiode}, language = {en} } @inproceedings{SchwarzRungHellmann2016, author = {Schwarz, Simon and Rung, Stefan and Hellmann, Ralf}, title = {Simulation of process parameters towards the generation of low spatial frequency LIPSS on dielectric materials}, series = {MultiScience - XXX. microCAD International Multidisciplinary Scientific Conference}, booktitle = {MultiScience - XXX. microCAD International Multidisciplinary Scientific Conference}, year = {2016}, subject = {Laserbestrahlung}, language = {en} } @inproceedings{KeferSchmaussHellmann2023, author = {Kefer, Stefan and Schmauss, Bernhard and Hellmann, Ralf}, title = {Sapphire-Based Planar Bragg Grating Devices}, series = {28th International Conference on Optical Fiber Sensors}, booktitle = {28th International Conference on Optical Fiber Sensors}, isbn = {978-1-957171-30-2}, doi = {10.1364/OFS.2023.W2.4}, year = {2023}, abstract = {This study reports on the long-term stability and the high-temperature capability of sapphire-based photonic crystal waveguides with integrated Bragg gratings. Furthermore, their Bragg grating reflectivity as well as their temperature sensitivity is quantified.}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{KeferSchmaussHellmann2021, author = {Kefer, Stefan and Schmauss, Bernhard and Hellmann, Ralf}, title = {POLYMER PLANAR BRAGG GRATINGS BASED ON BULK CYCLIC OLEFIN COPOLYMERS: FABRICATION AND FUNCTIONALIZATION}, series = {Proceedings of Student Conference on Sensors, Systems and Measurement 2021}, booktitle = {Proceedings of Student Conference on Sensors, Systems and Measurement 2021}, isbn = {978-80-01-06822-9}, year = {2021}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{ScheurichBelleHellmannetal.2009, author = {Scheurich, Steffen and Belle, Stefan and Hellmann, Ralf and So, Sik and Sparrow, Ian and Emmerson, Greg}, title = {Planar optical waveguide bragg grating chemical sensor for online process control}, series = {3rd integrated optics - sensors, sensing structures and methodes Korbielow, PL}, booktitle = {3rd integrated optics - sensors, sensing structures and methodes Korbielow, PL}, year = {2009}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{SommerHornungEsenetal.2024, author = {Sommer, David and Hornung, Simon and Esen, Cemal and Hellmann, Ralf}, title = {Optimization of mechanical properties of additive manufactured IN 718 parts combining LPBF and in-situ high-speed milling}, series = {Laser 3D Manufacturing XI}, booktitle = {Laser 3D Manufacturing XI}, editor = {Gu, Bo and Chen, Hongqiang}, publisher = {SPIE}, doi = {http://dx.doi.org/10.1117/12.3000952}, year = {2024}, subject = {Hochgeschwindigkeitsfr{\"a}sen}, language = {en} } @inproceedings{HuehnleinTschirpkeHellmann2010, author = {H{\"u}hnlein, Kristof and Tschirpke, Katrin and Hellmann, Ralf}, title = {Optimisation of laser cutting using design of experiment - A comparative study of cutting thin ceramic layers using a fibre laser and a CO2 laser}, series = {Physics procedia}, volume = {5}, booktitle = {Physics procedia}, number = {Part B}, issn = {1875-3892}, pages = {243 -- 252}, year = {2010}, subject = {Laserschneiden}, language = {en} } @inproceedings{LutzSchwarzRungetal.2021, author = {Lutz, Christian and Schwarz, Simon and Rung, Stefan and Marx, Jan and Esen, Cemal and Hellmann, Ralf}, title = {Optical system for multi Bessel beam high power ultrashort pulsed laser processing using a spatial light modulator}, series = {Lasers in Manufacturing - LiM 2021}, booktitle = {Lasers in Manufacturing - LiM 2021}, year = {2021}, abstract = {We report on an optical setup for multi Bessel beam processing combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams exhibit various advantages over conventional Gaussian beams for ultrashort pulsed laser processing. Especially for micromachining of transparent materials, applications such as micro-hole drilling or the generation of voids benefit from the increased focal length of the applied Bessel beam. In addition, on account of the significantly increased average output power of industrial ultrashort pulsed lasers over the last years, there is a high demand on multi spot applications for using the available laser power in efficient production processes. Our optical concept combines the dynamic possibilities of beam splitting using spatial light modulator with the benefits of Bessel beams facilitating multi Bessel beam processing.}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{RosenbergerBelleHellmann2011, author = {Rosenberger, Manuel and Belle, Stefan and Hellmann, Ralf}, title = {Optical interrogation of chemical and temperature bragg grating sensors using tunable fiber coupled bandpass filter}, series = {Proceeding XXV microCAD, International scientific conference, 2011, Section H}, booktitle = {Proceeding XXV microCAD, International scientific conference, 2011, Section H}, pages = {25 -- 30}, year = {2011}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{RosenbergerBelleHellmann2009, author = {Rosenberger, Manuel and Belle, Stefan and Hellmann, Ralf}, title = {Optical interrogation of bragg grating sensors using tunable fibre based bandpass filter}, series = {Proceedings of the 20st international science conference, Mittweida}, booktitle = {Proceedings of the 20st international science conference, Mittweida}, year = {2009}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{BelleRosenbergerHellmann2011, author = {Belle, Stefan and Rosenberger, Manuel and Hellmann, Ralf}, title = {Optical fibre sensing in the production process and storage of biofuels}, series = {Proceeding XXV microCAD, International scientific conference, 2011, Section A}, booktitle = {Proceeding XXV microCAD, International scientific conference, 2011, Section A}, pages = {21 -- 26}, year = {2011}, subject = {Biokraftstoff}, language = {en} } @inproceedings{AdelmannNeumeierSchleieretal.2015, author = {Adelmann, Benedikt and Neumeier, Benedikt and Schleier, Max and Wilmann, Eugen and Hellmann, Ralf}, title = {Optical cutting tear detection system for industrial fiber laser based cutting machines}, series = {Lasers in Manufacturing Conference 2015}, booktitle = {Lasers in Manufacturing Conference 2015}, year = {2015}, subject = {Laserschneiden}, language = {en} } @inproceedings{KalmarHellmannRegertetal.2011, author = {Kalm{\´a}r, L{\´a}szl{\´o} and Hellmann, Ralf and R{\´e}gert, Tam{\´a}s and Varga, Zoltan}, title = {Numerical simulation of heat transfer procedure in high power LED modules}, series = {Proceedings of the 12th technical and scientific meeting}, booktitle = {Proceedings of the 12th technical and scientific meeting}, pages = {18 -- 20}, year = {2011}, subject = {Lumineszenzdiode}, language = {en} } @inproceedings{KalmarHellmannRegertetal.2012, author = {Kalm{\´a}r, L{\´a}szl{\´o} and Hellmann, Ralf and R{\´e}gert, Tam{\´a}s and Varga, Zoltan}, title = {Numerical investigation of unsteady heat transport procedure in high power LED module}, series = {GEP}, volume = {2012}, booktitle = {GEP}, number = {1}, pages = {43 -- 46}, year = {2012}, subject = {Lumineszenzdiode}, language = {en} } @inproceedings{KalmarHellmannRegertetal.2012, author = {Kalm{\´a}r, L{\´a}szl{\´o} and Hellmann, Ralf and R{\´e}gert, Tam{\´a}s and Varga, Zoltan}, title = {Numerical investigation of heat transport procedure in high power LED modules}, series = {Proceedings of the XXVI International MicroCAD Conference, Miskolc (Hungary)}, booktitle = {Proceedings of the XXVI International MicroCAD Conference, Miskolc (Hungary)}, pages = {43 -- 46}, year = {2012}, subject = {Lumineszenzdiode}, language = {en} } @inproceedings{SommerTruetschEsenetal.2025, author = {Sommer, David and Truetsch, Ben and Esen, Cemal and Hellmann, Ralf}, title = {Microstructural Fracture Behaviour of PBF-LB/M Inconel 718 Components within different HIP Processes}, series = {Lasers in Manufacturing, M{\"u}nchen, Juni 2025}, booktitle = {Lasers in Manufacturing, M{\"u}nchen, Juni 2025}, year = {2025}, abstract = {We report on a study of different hot isostatic pressing (HIP) cycles, improving the mechanical properties of additively manufactured Inconel 718 components. For this, PBF-LB/M built components are post-processed by different HIP sequences, as gas pressure and processing time are varied, leading to differences in microstructure and material characteristics. Static and dynamic mechanical testing are performed, evaluating the changes in mechanical properties with particular focus on the ultimate tensile strength and endurance limit. Furthermore, metallographic analysis is employed to investigate the achieved density and microhardness. Microstructural analysis, showing the grain boundaries, is used to identify generated phases and precipitations of the material matrix. Moreover, the fracture behaviour is classified by grain deformation during mechanical testing. As the HIP leads to microstructural changes of Inconel 718 components, mechanical properties can be improved significantly, enhancing the ultimate tensile strength and simultaneously the endurance limit.}, subject = {Isostatisches Heißpressen}, language = {de} } @inproceedings{KollerHesslerRosenbergeretal.2012, author = {Koller, Georg and Hessler, Steffen and Rosenberger, Manuel and Belle, Stefan and Hellmann, Ralf}, title = {Micro-structured optical waveguide fabrication in PMMA using low frequency reactive ion etching}, series = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, booktitle = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, year = {2012}, subject = {Wellenleiter}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Manufacturing of optical elements by non-contact laser processing}, series = {Seventh European Seminar on Precision Optics Manufacturing, Proceedings}, booktitle = {Seventh European Seminar on Precision Optics Manufacturing, Proceedings}, number = {11478}, year = {2020}, subject = {Laserbearbeitung}, language = {en} } @inproceedings{RischHuehnleinKnoelletal.2009, author = {Risch, Anna and H{\"u}hnlein, Kristof and Kn{\"o}ll, J{\"u}rgen and Hellmann, Ralf}, title = {Laserscribing of transparent conductive oxides - a comparative study using nanosecond and picosecond pulsed solid state lasers}, series = {Proceedings of the 20st International Scientific Conference, Mittweida, 2009}, booktitle = {Proceedings of the 20st International Scientific Conference, Mittweida, 2009}, year = {2009}, subject = {Festk{\"o}rperlaser}, language = {en} } @inproceedings{RungBischoffJaegeretal.2014, author = {Rung, Stefan and Bischoff, Christian and J{\"a}ger, Erwin and Umhofer, Udo and Hellmann, Ralf}, title = {Laser thin film ablation with multiple beams and tailored beam profiles}, series = {Proceedings of SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX}, volume = {8967}, booktitle = {Proceedings of SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX}, year = {2014}, subject = {Laserablation}, language = {en} } @inproceedings{RungHellmann2012, author = {Rung, Stefan and Hellmann, Ralf}, title = {Laser scribing of metallized transparent conductive oxide - A comparative study using top hat and Gaussian beam profiles}, series = {Proceedings of the XXVI International MicroCAD Conference - Material Processing Technologies}, booktitle = {Proceedings of the XXVI International MicroCAD Conference - Material Processing Technologies}, year = {2012}, subject = {Laserbearbeitung}, language = {en} } @inproceedings{JaegerRaedelBischoffetal.2014, author = {J{\"a}ger, Erwin and R{\"a}del, Ulrich and Bischoff, Christian and Umhofer, Udo and Rung, Stefan and Hellmann, Ralf}, title = {Laser micromachining - parallel processing with multiple top hat beams}, series = {8th International Conference on Photonic Technologies LANE 2014}, booktitle = {8th International Conference on Photonic Technologies LANE 2014}, year = {2014}, subject = {Laserbearbeitung}, language = {de} } @inproceedings{RischHellmann2011, author = {Risch, Anna and Hellmann, Ralf}, title = {Laser induced modification of GZO thin film}, series = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, booktitle = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, pages = {69 -- 74}, year = {2011}, subject = {Laser}, language = {en} } @inproceedings{HasenstabAdelmannHellmann2013, author = {Hasenstab, Stefan and Adelmann, Benedikt and Hellmann, Ralf}, title = {Laser Cutting of Alumina and Aluminum Nitride with a 500 W Single Mode Fiber Laser}, series = {XXVII. microCAD International Scientific Conference}, booktitle = {XXVII. microCAD International Scientific Conference}, year = {2013}, subject = {Laserschneiden}, language = {en} } @inproceedings{RischHellmann2011, author = {Risch, Anna and Hellmann, Ralf}, title = {ITO thin film laser patterning by picosecond laser}, series = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, booktitle = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, pages = {63 -- 68}, year = {2011}, subject = {Laserbearbeitung}, language = {en} } @inproceedings{BelleScheurichHellmann2009, author = {Belle, Stefan and Scheurich, Steffen and Hellmann, Ralf}, title = {Interrogation water content in organic solvents by planar bragg grating sensors}, series = {Proceedings SENSOR}, booktitle = {Proceedings SENSOR}, number = {Vol. II, P3.2}, isbn = {978-3-9810993-6-2}, pages = {324 -- 329}, year = {2009}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{RothEsenHellmann2020, author = {Roth, Gian-Luca and Esen, Cemal and Hellmann, Ralf}, title = {Internal micro structuring of transparent optical polymers by fs laser}, series = {Laser-based Micro-and Nanoprocessing XIV 2020}, volume = {11268}, booktitle = {Laser-based Micro-and Nanoprocessing XIV 2020}, publisher = {International Society for Optics and Photonics}, doi = {10.1117/12.2543487}, pages = {112681L}, year = {2020}, abstract = {Lab-on-chip systems are based on components to transport, mix, separate and analyse small volumes of different fluids. The consecutive integration of more complex functions into a single and compact chip demands on multilayer systems. As the classical production using a stacking and joining of single processed layers is elaborate and limited in terms of multilayer structures, an uprising trend to fabricate those devices is the internal, three dimensional processing of transparent substrates by using ultrashort laser pulses. In this study, we report on the generation of internal hollow architectures created by focused 514nm femtosecond laser pulses inside optical polymer bulk materials of different polymers. The three-dimensional channel layout is implemented by moving the sample using three-dimensional motorized stages, allowing arbitrary complex shaped internal channel architectures. Size and cross sectional shape of a single internal generated microchannel are determined by the intensity distribution of the focal voxel. In particular, we show a comprehensive parameter study to improve this laser process with respect to a higher processing speed and stability.}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{SauerKeferRuppertetal.2019, author = {Sauer, Theresia and Kefer, Stefan and Ruppert, Wolfgang and Hellmann, Ralf and Kaloudis, Michael}, title = {Integration of Bragg grating sensors in components made of carbon fiber reinforced polymers}, series = {Tagungsband der 20. GMA/ITG-Fachtagung Sensoren und Messsysteme 2019, 25.06.2019 - 26.06.2019, N{\"u}rnberg, Deutschland}, booktitle = {Tagungsband der 20. GMA/ITG-Fachtagung Sensoren und Messsysteme 2019, 25.06.2019 - 26.06.2019, N{\"u}rnberg, Deutschland}, isbn = {978-3-9819376-0-2}, doi = {10.5162/sensoren2019/P3.12}, pages = {806 -- 810}, year = {2019}, abstract = {This contribution discusses the integration of polymer planar Bragg grating sensors (PPBG) into carbon fiber reinforced polymer (CFRP) components. For the first time, it is shown that PPBGs based on cyclic olefin copolymers can be integrated into commercial-grade composites, thereby withstanding the demanding production processes. Pre-impregnated fibers are stacked and partially modified to form a sensor pocket. Afterwards, the CFRP specimen containing the optical sensor is cured in a heated mechanical press for 2 hours at a pressure of 7 bar and a temperature of 120 °C. A subsequent evalutaion of the sensor signal shows a Bragg wavelength shift of 1236 pm and a decline in signal amplitude of -2 dB. Three-point flexural tests of the cured sample reveal a linear behavior of the sensor signal towards external loads. The determined sensitivity in dependence of the CFRP specimen's maximum central deflection is -112 pm/mm, while correlation to the applied force results in a sensitivity of -5 pm/N.}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{SommerPetersEsenetal.2025, author = {Sommer, David and Peters, Maximilian and Esen, Cemal and Hellmann, Ralf}, title = {Influence of in-situ high-speed milling within a hybrid additive manufacturing approach on the fatigue behaviour of Inconel 718 lattice structures}, series = {Lasers in Manufacturing, M{\"u}nchen, Juni 2025}, booktitle = {Lasers in Manufacturing, M{\"u}nchen, Juni 2025}, year = {2025}, abstract = {As lattice structures in various designs are used in additive manufacturing for lightweight components, the mechanical characterisation and fracture behaviour is of upmost importance for their industrial application. In this study, the fatigue behaviour of Inconel 718 lattice structures is evaluated, comparing sole PBF-LB/M to a hybrid additive manufacturing process combining PBF-LB/M with in-situ high-speed milling. At first, the static and dynamic mechanical load behaviour of different packing densities is analysed, determining the compressive strength and the endurance limit. Secondly, hybrid additive manufactured components are compared to PBF-LB/M built parts with respect to these mechanical properties, revealing improved compressive properties and modified regimes of fatigue. In addition, differences in fracture behaviour are qualified by fractographic and surface analysis. Overall, it can be summarized that the mechanical load characteristics, especially the fatigue behaviour, are improved for hybrid additively manufactured components with a superior surface quality of Ra < 1 µm.}, subject = {Hochgeschwindigkeitsfr{\"a}sen}, language = {de} } @inproceedings{SchwarzEsenHellmann2018, author = {Schwarz, Simon and Esen, Cemal and Hellmann, Ralf}, title = {Homogeneous low spatial frequency LIPSS on dielectrics generated by beam-shaped femtosecond pulsed laser irradiation}, series = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, booktitle = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, year = {2018}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{MarxEsenLutzetal.2023, author = {Marx, Jan and Esen, Cemal and Lutz, Christian and Hellmann, Ralf and Ostendorf, Andreas}, title = {Holographic tuning of physical axicons}, volume = {2023}, number = {154}, publisher = {LiM 2023 Proceedings}, pages = {1 -- 9}, year = {2023}, abstract = {Axicon generated Bessel beams are a popular tool for high aspect ratio precision laser drilling. Spot diameter and working distance are given by the geometric parameters of the axicon and the wavelength used. Thus, it is difficult to manipulate the beam shape of a Bessel beam for a given setup. Spatial light modulators (SLMs) overcome limitations in flexibility. However, due to the limited phase shift of SLMs, only Bessel beams with flat cone angles and large focal length can be generated. In this contribution, an approach for generating Bessel beams with a shorter, but tunable focal length is presented. A physical axicon was combined with an SLM. A holographic image of a negative axicon is put on the SLM to generate a ring beam, which is focused by a subsequent physical axicon to get a small focal diameter. Thus, different sized high aspect ratio micro holes can be drilled without using any moving components.}, subject = {Bessel-B{\"u}ndel}, language = {en} } @inproceedings{KeferZettlSchmaussetal.2023, author = {Kefer, Stefan and Zettl, Julian and Schmauss, Bernhard and Esen, Cemal and Hellmann, Ralf}, title = {High-Precision Micromachining of Sapphire Towards Optical Waveguiding Structures using Femtosecond Lasers}, series = {Laser-based Micro- and Nanoprocessing XVII}, booktitle = {Laser-based Micro- and Nanoprocessing XVII}, editor = {Kling, Rainer and Pfleging, Wilhelm and Watanabe, Akira}, isbn = {9781510659230}, doi = {10.1117/12.2648758}, pages = {3 -- 11}, year = {2023}, abstract = {While sapphire is one of the most durable materials, its properties entail that high-precision machining, especially in the sub-millimeter regime, is still challenging. This contribution demonstrates and discusses novel femtosecond laser-based micromachining approaches for the fabrication of rotational-symmetric sapphire workpieces, specifically the generation of optical fibers by means of laser lathe of sapphire rods and the practical realization of windmill fibers. In addition, volume refractive index modification in planar sapphire substrates is presented to induce photonic crystal waveguides. The micromachined structures are comprehensively examined with respect to geometric fidelity, surface roughness, refractive index modification, and potential optical waveguiding properties. All micromachining approaches are done by means of frequency-doubled or frequency-tripled femtosecond laser radiation. Different laser optical setups including laser scanning head, spatial beam profilers including a spatial light modulator and axial rotatory movement of the specimen are employed for micro structuring and in-depth refractive index modifications. In particular for laser lathe, a sophisticated scanning pattern, in combination with an incremental axial rotatory movement of the specimen, allows for the precise diameter reduction of sapphire rods with 250 µm diameter to fibers with outer diameters of 25 µm. By supporting the workpiece with a V-groove fixture, multi-mode fibers with lengths up to 20 cm can be processed with an average surface roughness of 250 nm. Additionally, an adapted ablation scanning sequence enables the first practical demonstration of sapphire windmill fibers. Furthermore, using a spatial light modulator allows for the adaption of the laser propagation properties as to enable volume refractive index modifications with free-form arrangement. Hexagonal patterns of refractive index modifications surrounding a pristine waveguide core are fabricated and single-mode waveguiding at 1550 nm is verified. Finally, the possibility of integrating Bragg gratings into this photonic waveguide type is demonstrated}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{HeilmannHellmann2011, author = {Heilmann, Eva-Maria and Hellmann, Ralf}, title = {High Speed Fibre Laser Material processing of Stainless Steel Tapes Under Tension}, series = {XXV International MicroCAD Conference - Material Processing Technologies, Miskolc (Hungary), 21-25}, booktitle = {XXV International MicroCAD Conference - Material Processing Technologies, Miskolc (Hungary), 21-25}, year = {2011}, subject = {Lasertechnologie}, language = {en} } @inproceedings{SchwarzRungHellmann2017, author = {Schwarz, Simon and Rung, Stefan and Hellmann, Ralf}, title = {High quality one-dimensional low spatial frequency LIPSS on sapphire generated by Top-Hat beam shaped ultrashort-pulsed laser}, series = {MultiScience - XXXI. microCAD International Multidisciplinary Scientific Conference}, booktitle = {MultiScience - XXXI. microCAD International Multidisciplinary Scientific Conference}, year = {2017}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{DudutisPipirasSchwarzetal.2019, author = {Dudutis, Juozas and Pipiras, Jokūbas and Schwarz, Simon and Rung, Stefan and Hellmann, Ralf and Račiukaitis, Gediminas and Gečys, Paulius}, title = {Glass cutting by oblate-tip axicon-generated Bessel-Gaussian beams}, series = {Open Readings, 63rd International Conference for Students of Physics and Natural Sciences}, booktitle = {Open Readings, 63rd International Conference for Students of Physics and Natural Sciences}, year = {2019}, subject = {Laserschneiden}, language = {en} } @inproceedings{GlaabHellmann2010, author = {Glaab, Johannes and Hellmann, Ralf}, title = {Germicidal potential of ultraviolet-LED emitting different wavelength for the inactivation of indigenous coliform bacteria}, series = {Water research conference, Lissabon, Portugal}, booktitle = {Water research conference, Lissabon, Portugal}, year = {2010}, subject = {Lumineszenzdiode}, language = {en} } @inproceedings{RothWolfEsenetal.2019, author = {Roth, Gian-Luca and Wolf, Bastian and Esen, Cemal and Hellmann, Ralf}, title = {Generation of internal 3D microfluidic architectures in polymers by fs laser processing}, series = {Lasers in Manufacturing 2019}, booktitle = {Lasers in Manufacturing 2019}, year = {2019}, abstract = {Microfluidic lab on chip systems require components to transport, mix, separate and analyse small volumes of different fluids. In this study, we report on the laser generation of internal hollow architectures created by focused 514 nm femtosecond laser pulses inside PMMA bulk material. Size and cross-sectional shape of a single internal generated microchannel are determined by the intensity distribution inside the focal voxel and can be controlled either by the numerical aperture of the focusing objective or by laser beam shaping. As both approaches are practically limited with respect to the realizable cross-sectional shapes, we present a process based on an internal hatching to expand the achievable channel cross-sections and thereby enable the possibility to create complex 3D shaped internal structures. This process is applied to create fully internal functional microfluidic elements such as mixers which are part of most polymer lab-on-chip systems.}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{KeferPapeSchmaussetal.2023, author = {Kefer, Stefan and Pape, Natalie and Schmauss, Bernhard and Hellmann, Ralf}, title = {Fabrication of Lattice-Like Waveguides in Planar Cyclic Olefin Copolymers}, series = {28th International Conference on Optical Fiber Sensors}, booktitle = {28th International Conference on Optical Fiber Sensors}, isbn = {978-1-957171-30-2}, doi = {10.1364/OFS.2023.Th6.69}, year = {2023}, abstract = {This work demonstrates the femtosecond laser-based fabrication of lattice-like waveguides in planar cyclic olefin copolymers. An overview of the fabrication process is provided and waveguiding in the C-band is proven via optical near-field analysis.}, subject = {Wellenleiter}, language = {en} } @inproceedings{KeferRosenbergerHessleretal.2020, author = {Kefer, Stefan and Rosenberger, Manuel and Hessler, Steffen and Girschikofsky, Maiko and Belle, Stefan and Roth, Gian-Luca and Schmauss, Bernhard and Hellmann, Ralf}, title = {Fabrication and Applications of Polymer Planar Bragg Grating Sensors based on Cyclic Olefin Copolymers}, series = {2019 Photonics \& Electromagnetics Research Symposium - Fall (PIERS - Fall)}, booktitle = {2019 Photonics \& Electromagnetics Research Symposium - Fall (PIERS - Fall)}, publisher = {Institute of Electrical and Electronics Engineers}, isbn = {978-1-7281-5304-9}, doi = {10.1109/PIERS-Fall48861.2019.9021801}, pages = {647 -- 655}, year = {2020}, abstract = {This contribution reviews recent advancements, current research and possible applications of polymer planar Bragg grating (PPBG) sensors with a focus on the utilization of cyclic olefin copolymer (COC) substrates. COC-PPBGs can be handled and fabricated efficiently by employing a single writing step procedure which features simultaneous generation of waveguide and Bragg grating structure within an injection molded substrate. The resulting photonic structures exhibit an attenuation as low as 1.2 dB cm-1 and a reflectivity up to 99 \%. The potential of COC-PPBGs for high-temperature applications is proven by demonstrating temperature measurements up to 160 °C. Moreover, it is possible to employ single PPBGs for multidimensional stress and strain sensing or even three-dimensional shape reconstruction. Due to their excellent properties, it is feasible to integrate COC-PPBGs into commercial-grade carbon fiber reinforced polymer workpieces for structural health monitoring. Furthermore, utilization of appropriate coatings enables functionalization of PPBGs for refractive index sensing and thus biochemical applications. Beside the fabrication and characterization of COC-based PPBGs, this contribution exemplifies and reviews such applications.}, subject = {Optischer Sensor}, language = {en} } @inproceedings{AdelmannHellmann2011, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {DOE based optimization of fibre laser cutting of metals}, series = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, booktitle = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, pages = {7 -- 12}, year = {2011}, subject = {Laserschneiden}, language = {en} } @inproceedings{BischoffJaegerRungetal.2012, author = {Bischoff, Christian and J{\"a}ger, Erwin and Rung, Stefan and Hellmann, Ralf}, title = {Diffractive beam shaping optics for efficient micromachining}, series = {Proceedings of the LASYS (Internationale Fachmesse f{\"u}r Laser-Materialbearbeitung) - SLT (Stuttgarter Lasertage) 2012}, booktitle = {Proceedings of the LASYS (Internationale Fachmesse f{\"u}r Laser-Materialbearbeitung) - SLT (Stuttgarter Lasertage) 2012}, year = {2012}, subject = {Laserbearbeitung}, language = {en} } @inproceedings{AdelmannHellmann2011, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {Different modulation schemes in fibre laser cutting}, series = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, booktitle = {Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies}, pages = {1 -- 6}, year = {2011}, subject = {Laserschneiden}, language = {en} } @inproceedings{KaloumenosAmrheinGlaabetal.2010, author = {Kaloumenos, Mareiki and Amrhein, Frank and Glaab, Johannes and Sauer, Michael and Hellmann, Ralf and Kaloudis, Michael}, title = {Development of a UV-Light Source with Highest Power Density Based on Light Emitting Diode Technology for Applications in Production Engineering, in Production Engineering and manufacturing Systems}, series = {Proceedings of the XXIV International Scientific Conference Miskolc, Ungarn}, booktitle = {Proceedings of the XXIV International Scientific Conference Miskolc, Ungarn}, year = {2010}, subject = {Lumineszenzdiode}, language = {en} } @inproceedings{RosenbergerBelleHellmann2011, author = {Rosenberger, Markus and Belle, Stefan and Hellmann, Ralf}, title = {Detection of unlabeled DNA hybridization with a planar Bragg Grating Sensor}, series = {XXV International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, booktitle = {XXV International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, number = {Section R}, pages = {67 -- 72}, year = {2011}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{RosenbergerBelleHellmann2011, author = {Rosenberger, Manuel and Belle, Stefan and Hellmann, Ralf}, title = {Detection of biochemical reaction and DNA hybridization using a planar bragg grating sensor}, series = {Proceeding SPIE, Vol. 8073, article id: 80730C}, booktitle = {Proceeding SPIE, Vol. 8073, article id: 80730C}, number = {8073}, doi = {10.1117/12.886785}, year = {2011}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Current results on laser-based production of complex optics in glass}, series = {10. Wetzlarer Herbsttagung "Moderne Optikfertigung", 29. - 30. September 2020, Wetzlar}, booktitle = {10. Wetzlarer Herbsttagung "Moderne Optikfertigung", 29. - 30. September 2020, Wetzlar}, year = {2020}, subject = {Laserbearbeitung}, language = {en} } @inproceedings{LutzHelmEsenetal.2024, author = {Lutz, Christian and Helm, Jonas and Esen, Cemal and Hellmann, Ralf}, title = {Computational optimization of borehole sequences for the reduction of heat accumulation in drilling processes using ultrashort pulse lasers}, series = {Laser-based Micro- and Nanoprocessing XVIII}, booktitle = {Laser-based Micro- and Nanoprocessing XVIII}, editor = {Kling, Rainer and Pfleging, Wilhelm and Sugioka, Koji}, publisher = {SPIE}, doi = {10.1117/12.3000930}, year = {2024}, abstract = {We report on laser drilling of borehole arrays using a high-power ultrashort pulse laser with particular focus on reducing heat accumulation in the workpiece by optimizing the drilling sequence, particularly for highly efficient multi-spot drilling. Different optimization approaches are chosen to improve the drilling sequence, also comparing a simplex algorithm and an evolutionary algorithm. From a laser application point of view, we also compare drilling sequences using a single spot and up to 16-fold multi-spots generated by a spatial light modulator, as to accelerate the drilling process in terms of the number of drilled holes per second. To evaluate the temperatures generated during drilling of up to 40,000 holes in less than 76 seconds in stainless steel foil, temperatures are measured by a thermal imaging camera and subsequently compared to a COMSOL-based simulation for all optimized drilling sequences. With respect to an average temperature of 706 °C without optimization, a reduction by 252 °C, i.e., a reduction by nearly 36 \% based on the Celsius scale, is achieved using a 4 × 4 beam splitter and an optimized drilling sequence with a drilling rate of 526 holes per second. In addition, using a 2 × 2 beam splitter, a temperature reduction of up to 40.5 \% is achieved for a drilling process with a rate of 129 holes per second using an optimized drilling sequence.}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{AdelmannHellmann2015, author = {Adelmann, Benedikt and Hellmann, Ralf}, title = {Comparative study of experimentally determined and simulated mechanical strength of fiber laser cut alumina substrates}, series = {Proceedings of the 7th International Congress on Laser Advanced Materials Processing}, volume = {2015}, booktitle = {Proceedings of the 7th International Congress on Laser Advanced Materials Processing}, number = {15}, pages = {1 -- 9}, year = {2015}, subject = {Laserschneiden}, language = {en} } @inproceedings{LutzSchwarzMarxetal.2024, author = {Lutz, Christian and Schwarz, Simon and Marx, Jan and Esen, Cemal and Hellmann, Ralf}, title = {Combination of an axicon and a spatial light modulator for the generation of multiBessel beams for microdrilling using ultrashort pulsed laser}, series = {Laser-based Micro- and Nanoprocessing XVIII}, booktitle = {Laser-based Micro- and Nanoprocessing XVIII}, editor = {Kling, Rainer and Pfleging, Wilhelm and Sugioka, Koji}, publisher = {SPIE}, doi = {10.1117/12.3000946}, year = {2024}, abstract = {Due to their special beam profile, Bessel beams offer advantageous properties for micro-drilling and internal volume processing, especially for transparent materials. In addition, the laser power of industrial ultrashort pulsed lasers hasnincreased significantly in recent years, offering the possibility of highly efficient processes using multi-spot profiles. We report on optical simulations and an experimental optical setup for generating multi-Bessel beams by combining a refractive axicon and a spatial light modulator. This setup offers a new possibility of multi-Bessel beam generation by functional division of the Bessel beam generation by the axicon and the possibility of separation flexible beam splitting by a spatial light modulator. The beam profiles generated with this setup are analyzed and compared in this study using optical simulations and experiments. In addition to the analysis of the Bessel beams in the machining plane, they are also analyzed in the propagation direction by means of intensity distributions measured by a camera in small-step z positions. Furthermore, the experimental applicability of the module-based beam shaping system is demonstrated by integrating into an existing laser system.}, subject = {Ultrakurzzeitlaser}, language = {en} } @inproceedings{SchwarzEsenHellmann2018, author = {Schwarz, Simon and Esen, Cemal and Hellmann, Ralf}, title = {CO2 laser polishing of femtosecond shaped micro-optical components}, series = {3rd Conference on Laser Polishing LaP 2018}, booktitle = {3rd Conference on Laser Polishing LaP 2018}, year = {2018}, subject = {Kohlendioxidlaser}, language = {en} } @inproceedings{DudutisPipirasSchwarzetal.2019, author = {Dudutis, Juozas and Pipiras, Jokūbas and Schwarz, Simon and Rung, Stefan and Hellmann, Ralf and Gečys, Paulius}, title = {Bessel beam formation with all laser fabricated axicon - case of glass dicing applications}, series = {COLA 2019, 15th International Conference on Laser Ablation}, booktitle = {COLA 2019, 15th International Conference on Laser Ablation}, year = {2019}, subject = {Laserbestrahlung}, language = {en} } @inproceedings{RungRexhepiHellmann2013, author = {Rung, Stefan and Rexhepi, Mal and Hellmann, Ralf}, title = {Beam shaping for enhanced through-put of laser ablation of transparent conductive films}, series = {Proceedings of the XXVII MicroCAD International Scientific Conference}, volume = {2013}, booktitle = {Proceedings of the XXVII MicroCAD International Scientific Conference}, year = {2013}, subject = {Laserablation}, language = {en} } @inproceedings{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Axicon fabrication with ultrashort and CO2 laser}, series = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, booktitle = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, year = {2018}, subject = {Ultrakurzzeitlaser}, language = {de} } @inproceedings{ScheurichBelleHellmannetal.2009, author = {Scheurich, Steffen and Belle, Stefan and Hellmann, Ralf and So, Sik and Sparrow, Ian and Emmerson, Greg}, title = {Application of a silica-on-silicon planar optical waveguide. Bragg grating sensor for organic liquid compound detection}, series = {SPIE Optics an optoelectronics conference, Proceedings of SPIE, Vol. 7356, Prag, CR}, booktitle = {SPIE Optics an optoelectronics conference, Proceedings of SPIE, Vol. 7356, Prag, CR}, number = {7356}, isbn = {978-0819476302}, year = {2009}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {All laser-based fabrication of optical elements}, series = {Proceedings of SPIE 11270, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX}, booktitle = {Proceedings of SPIE 11270, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XX}, year = {2020}, subject = {Ultrakurzzeitlaser}, language = {de} } @inproceedings{SommerSafiEsenetal.2024, author = {Sommer, David and Safi, Abdulrahman and Esen, Cemal and Hellmann, Ralf}, title = {Additive manufacturing of Nickel-based superalloy: optimization of surface roughness using integrated high-speed milling}, series = {Laser 3D Manufacturing XI}, booktitle = {Laser 3D Manufacturing XI}, editor = {Gu, Bo and Chen, Hongqiang}, publisher = {SPIE}, doi = {http://dx.doi.org/10.1117/12.3000972}, year = {2024}, subject = {Hochgeschwindigkeitsfr{\"a}sen}, language = {en} } @inproceedings{BischoffEsenHellmann2023, author = {Bischoff, Kay and Esen, Cemal and Hellmann, Ralf}, title = {Acceleration of Femtosecond Reductive Laser Sintering of Copper(II) Oxide for Conductive Copper Patterns on Cyclic Olefin Copolymers}, series = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, abstract = {We report on the acceleration of femtosecond reductive laser sintering of copper (II) oxide on the surface of transparent cyclic olefin copolymers (COC) by varying the focus size to generate metallic copper (Cu) layers. By using different focusing conditions, different process speeds are achieved, and the structural accuracies are controlled. The formation of Cu lines is observed for different focus sizes at various scan speeds, which is attributed to laser exposure duration and chemical reaction time. The formed lines are categorized and measured by optical microscopy and provide the basis for two-dimensional Cu surfaces. By hatching, high quality conductive films are produced with an increased focus diameter of up to 400 µm at a scan speed of 400 mm/s and a hatch distance of 250 µm resulting in a multiple increased process speed by a factor of thirteen compared to previous research. Using 4-tip measurement , a low sheet resistance of 0.165 Ω/sq was validated on these Cu films, which have an atomic Cu content of 89.5\%.}, subject = {Femtosekundenlaser}, language = {en} }