@inproceedings{KeferPapeSchmaussetal.2023, author = {Kefer, Stefan and Pape, Natalie and Schmauss, Bernhard and Hellmann, Ralf}, title = {Fabrication of Lattice-Like Waveguides in Planar Cyclic Olefin Copolymers}, series = {28th International Conference on Optical Fiber Sensors}, booktitle = {28th International Conference on Optical Fiber Sensors}, isbn = {978-1-957171-30-2}, doi = {10.1364/OFS.2023.Th6.69}, year = {2023}, abstract = {This work demonstrates the femtosecond laser-based fabrication of lattice-like waveguides in planar cyclic olefin copolymers. An overview of the fabrication process is provided and waveguiding in the C-band is proven via optical near-field analysis.}, subject = {Wellenleiter}, language = {en} } @inproceedings{KeferSchmaussHellmann2023, author = {Kefer, Stefan and Schmauss, Bernhard and Hellmann, Ralf}, title = {Sapphire-Based Planar Bragg Grating Devices}, series = {28th International Conference on Optical Fiber Sensors}, booktitle = {28th International Conference on Optical Fiber Sensors}, isbn = {978-1-957171-30-2}, doi = {10.1364/OFS.2023.W2.4}, year = {2023}, abstract = {This study reports on the long-term stability and the high-temperature capability of sapphire-based photonic crystal waveguides with integrated Bragg gratings. Furthermore, their Bragg grating reflectivity as well as their temperature sensitivity is quantified.}, subject = {Bragg-Reflektor}, language = {en} } @inproceedings{FranzMueckeKunzetal.2023, author = {Franz, Daniel and M{\"u}cke, Dominik and Kunz, Tim and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {UV picosecond laser drilling of ABF film material for printed circuit boards using laser burst mode and beam shaping}, series = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, abstract = {We report on an experimental study of laser microvia percussion drilling of Ajinomoto build-up film (ABF) material using an ultrashort pulsed laser in the ultraviolet region. In order to optimize the drilling quality in terms of the fabricated taper and microvia diameter, the MHz burst mode is used in combination with both a Gaussian and a top-hat laser intensity distribution. To evaluate the influence of the top-hat beam shape on defocusing, microvias were drilled at different z-positions in the range of 200 μm evenly distributed around the focal plane. The drilling quality was evaluated by laser scanning microscopy and metallography. When using a top-hat beam shape, a reduced taper of down to 26.8 \% on average is achieved compared to a Gaussian beam. For the application of 3 intra-burst pulses, we find an improvement of the taper by 11.6\% compared to the single pulse mode due to the increasing heat accumulation. Using a top-hat beam shape in combination with the MHz burst mode, an 18.2 \% reduction in laser drilling time for a microvia with a similar taper is remarkable, demonstrating the high potential for scaling throughput in electronics manufacturing.}, subject = {Pikosekundenbereich}, language = {en} } @inproceedings{BischoffMueckeEsenetal.2023, author = {Bischoff, Kay and M{\"u}cke, Dominik and Esen, Cemal and Hellmann, Ralf}, title = {UV-Femtosecond-Laser Structuring of Silicon Carbide}, series = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, abstract = {We report on ultraviolet ultrashort pulsed laser processing of silicon carbide. Laser ablated cavities are evaluated with respect to their ablation rates, surface roughness and overall quality by varying the laser pulse fluence. Using this type of laser, high edge quality and surface roughness down to 107 nm can be achieved with an ablation efficiency of up to 0.228 mm 3 W -1 min -1. Functional surfaces are produced by generating laser induced periodic surface structures. The comparison with infrared wavelength underlines the advantages of the ultraviolet wavelength for laser micro machining this material. Significant differences with respect to the measured ablation depths and roughness as well as generated micro-and nanostructures appear. While infrared ablation is dominated by a chipping mechanism above a critical fluence of 9.93 Jcm -2 , higher ablation rates are observed with strong quality losses at the same time. In comparison to the infrared emission wavelength, in general , a significantly higher processing quality is achieved with the ultraviolet emission wavelength. In addition, the influence of spot size and repetition rate in UV processing is investigated. By increasing these parameters, a process acceleration without quality losses is enabled. The generation of a sophisticated microstructure exemplifies the advantages of processing silicon carbide with the UV laser reported here.}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{BischoffEsenHellmann2023, author = {Bischoff, Kay and Esen, Cemal and Hellmann, Ralf}, title = {Acceleration of Femtosecond Reductive Laser Sintering of Copper(II) Oxide for Conductive Copper Patterns on Cyclic Olefin Copolymers}, series = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, abstract = {We report on the acceleration of femtosecond reductive laser sintering of copper (II) oxide on the surface of transparent cyclic olefin copolymers (COC) by varying the focus size to generate metallic copper (Cu) layers. By using different focusing conditions, different process speeds are achieved, and the structural accuracies are controlled. The formation of Cu lines is observed for different focus sizes at various scan speeds, which is attributed to laser exposure duration and chemical reaction time. The formed lines are categorized and measured by optical microscopy and provide the basis for two-dimensional Cu surfaces. By hatching, high quality conductive films are produced with an increased focus diameter of up to 400 µm at a scan speed of 400 mm/s and a hatch distance of 250 µm resulting in a multiple increased process speed by a factor of thirteen compared to previous research. Using 4-tip measurement , a low sheet resistance of 0.165 Ω/sq was validated on these Cu films, which have an atomic Cu content of 89.5\%.}, subject = {Femtosekundenlaser}, language = {en} } @inproceedings{MarxEsenLutzetal.2023, author = {Marx, Jan and Esen, Cemal and Lutz, Christian and Hellmann, Ralf and Ostendorf, Andreas}, title = {Holographic tuning of physical axicons}, volume = {2023}, number = {154}, publisher = {LiM 2023 Proceedings}, pages = {1 -- 9}, year = {2023}, abstract = {Axicon generated Bessel beams are a popular tool for high aspect ratio precision laser drilling. Spot diameter and working distance are given by the geometric parameters of the axicon and the wavelength used. Thus, it is difficult to manipulate the beam shape of a Bessel beam for a given setup. Spatial light modulators (SLMs) overcome limitations in flexibility. However, due to the limited phase shift of SLMs, only Bessel beams with flat cone angles and large focal length can be generated. In this contribution, an approach for generating Bessel beams with a shorter, but tunable focal length is presented. A physical axicon was combined with an SLM. A holographic image of a negative axicon is put on the SLM to generate a ring beam, which is focused by a subsequent physical axicon to get a small focal diameter. Thus, different sized high aspect ratio micro holes can be drilled without using any moving components.}, subject = {Bessel-B{\"u}ndel}, language = {en} }