@inproceedings{FranzMueckeKunzetal.2023, author = {Franz, Daniel and M{\"u}cke, Dominik and Kunz, Tim and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {UV picosecond laser drilling of ABF film material for printed circuit boards using laser burst mode and beam shaping}, series = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, abstract = {We report on an experimental study of laser microvia percussion drilling of Ajinomoto build-up film (ABF) material using an ultrashort pulsed laser in the ultraviolet region. In order to optimize the drilling quality in terms of the fabricated taper and microvia diameter, the MHz burst mode is used in combination with both a Gaussian and a top-hat laser intensity distribution. To evaluate the influence of the top-hat beam shape on defocusing, microvias were drilled at different z-positions in the range of 200 μm evenly distributed around the focal plane. The drilling quality was evaluated by laser scanning microscopy and metallography. When using a top-hat beam shape, a reduced taper of down to 26.8 \% on average is achieved compared to a Gaussian beam. For the application of 3 intra-burst pulses, we find an improvement of the taper by 11.6\% compared to the single pulse mode due to the increasing heat accumulation. Using a top-hat beam shape in combination with the MHz burst mode, an 18.2 \% reduction in laser drilling time for a microvia with a similar taper is remarkable, demonstrating the high potential for scaling throughput in electronics manufacturing.}, subject = {Pikosekundenbereich}, language = {en} } @inproceedings{SchwarzRungEsenetal.2018, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Axicon fabrication with ultrashort and CO2 laser}, series = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, booktitle = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, year = {2018}, subject = {Ultrakurzzeitlaser}, language = {de} } @inproceedings{DudutisPipirasSchwarzetal.2019, author = {Dudutis, Juozas and Pipiras, Jokūbas and Schwarz, Simon and Rung, Stefan and Hellmann, Ralf and Gečys, Paulius}, title = {Bessel beam formation with all laser fabricated axicon - case of glass dicing applications}, series = {COLA 2019, 15th International Conference on Laser Ablation}, booktitle = {COLA 2019, 15th International Conference on Laser Ablation}, year = {2019}, subject = {Laserbestrahlung}, language = {en} } @inproceedings{SchwarzRungEsenetal.2020, author = {Schwarz, Simon and Rung, Stefan and Esen, Cemal and Hellmann, Ralf}, title = {Current results on laser-based production of complex optics in glass}, series = {10. Wetzlarer Herbsttagung "Moderne Optikfertigung", 29. - 30. September 2020, Wetzlar}, booktitle = {10. Wetzlarer Herbsttagung "Moderne Optikfertigung", 29. - 30. September 2020, Wetzlar}, year = {2020}, subject = {Laserbearbeitung}, language = {en} } @inproceedings{RungBischoffJaegeretal.2014, author = {Rung, Stefan and Bischoff, Christian and J{\"a}ger, Erwin and Umhofer, Udo and Hellmann, Ralf}, title = {Laser thin film ablation with multiple beams and tailored beam profiles}, series = {Proceedings of SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX}, volume = {8967}, booktitle = {Proceedings of SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX}, year = {2014}, subject = {Laserablation}, language = {en} } @inproceedings{JaegerRaedelBischoffetal.2014, author = {J{\"a}ger, Erwin and R{\"a}del, Ulrich and Bischoff, Christian and Umhofer, Udo and Rung, Stefan and Hellmann, Ralf}, title = {Laser micromachining - parallel processing with multiple top hat beams}, series = {8th International Conference on Photonic Technologies LANE 2014}, booktitle = {8th International Conference on Photonic Technologies LANE 2014}, year = {2014}, subject = {Laserbearbeitung}, language = {de} } @inproceedings{RungRexhepiHellmann2013, author = {Rung, Stefan and Rexhepi, Mal and Hellmann, Ralf}, title = {Beam shaping for enhanced through-put of laser ablation of transparent conductive films}, series = {Proceedings of the XXVII MicroCAD International Scientific Conference}, volume = {2013}, booktitle = {Proceedings of the XXVII MicroCAD International Scientific Conference}, year = {2013}, subject = {Laserablation}, language = {en} } @inproceedings{DudutisPipirasSchwarzetal.2019, author = {Dudutis, Juozas and Pipiras, Jokūbas and Schwarz, Simon and Rung, Stefan and Hellmann, Ralf and Račiukaitis, Gediminas and Gečys, Paulius}, title = {Glass cutting by oblate-tip axicon-generated Bessel-Gaussian beams}, series = {Open Readings, 63rd International Conference for Students of Physics and Natural Sciences}, booktitle = {Open Readings, 63rd International Conference for Students of Physics and Natural Sciences}, year = {2019}, subject = {Laserschneiden}, language = {en} } @inproceedings{SchwarzRungHellmann2016, author = {Schwarz, Simon and Rung, Stefan and Hellmann, Ralf}, title = {Simulation of process parameters towards the generation of low spatial frequency LIPSS on dielectric materials}, series = {MultiScience - XXX. microCAD International Multidisciplinary Scientific Conference}, booktitle = {MultiScience - XXX. microCAD International Multidisciplinary Scientific Conference}, year = {2016}, subject = {Laserbestrahlung}, language = {en} } @inproceedings{LutzSchwarzRungetal.2021, author = {Lutz, Christian and Schwarz, Simon and Rung, Stefan and Marx, Jan and Esen, Cemal and Hellmann, Ralf}, title = {Optical system for multi Bessel beam high power ultrashort pulsed laser processing using a spatial light modulator}, series = {Lasers in Manufacturing - LiM 2021}, booktitle = {Lasers in Manufacturing - LiM 2021}, year = {2021}, abstract = {We report on an optical setup for multi Bessel beam processing combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams exhibit various advantages over conventional Gaussian beams for ultrashort pulsed laser processing. Especially for micromachining of transparent materials, applications such as micro-hole drilling or the generation of voids benefit from the increased focal length of the applied Bessel beam. In addition, on account of the significantly increased average output power of industrial ultrashort pulsed lasers over the last years, there is a high demand on multi spot applications for using the available laser power in efficient production processes. Our optical concept combines the dynamic possibilities of beam splitting using spatial light modulator with the benefits of Bessel beams facilitating multi Bessel beam processing.}, subject = {Ultrakurzzeitlaser}, language = {en} }