@inproceedings{KloidtStockKleinebergetal.2019, author = {Andreas Kloidt and Hans-J{\"u}rgen Stock and Ulf Kleineberg and Thorsten D{\"o}hring and Michael Pr{\"o}pper and Kerstin Hilgers and Bernhard Heidemann and Thorsten Tappe and Bernt Schmiedeskamp and Ulrich Heinzmann}, title = {Preparation and microstructure analysis of Mo/Si multilayers as x-ray optical elements}, booktitle = {Proceedings of Symposium on Surface Science 1993}, volume = {1993}, pages = {115 -- 120}, year = {2019}, }