TY - JOUR A1 - Alexander, Morgan A1 - Short, Robert A1 - Jones, Frank A1 - Stollenwerk, Manfred A1 - Mathar, Gerd A1 - Zabold, Jochen A1 - Michaeli, Walter T1 - The heterogeneous nature of deposits from hexamethyldisiloxane/oxygen plasmas T2 - Ceramic films and coatings KW - Hexamethyldisiloxan KW - Sauerstoff KW - Plasma Y1 - 2019 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/1348 VL - 1995 IS - 54 SP - 87 EP - 99 ER -