@article{AlexanderShortJonesetal.2019, author = {Morgan Alexander and Robert Short and Frank Jones and Manfred Stollenwerk and Gerd Mathar and Jochen Zabold and Walter Michaeli}, title = {The heterogeneous nature of deposits from hexamethyldisiloxane/oxygen plasmas}, journal = {Ceramic films and coatings}, volume = {1995}, number = {54}, pages = {87 -- 99}, year = {2019}, }