@article{StollenwerkAlexanderShortetal.2019, author = {Manfred Stollenwerk and Morgan Alexander and Robert Short and Frank Jones and Jochen Zabold and Walter Michaeli}, title = {An X-ray photoelectron spectroscopic investigation into the chemical structure of deposits formed from hexamethyldisiloxane/ oxygen plasmas}, journal = {Journal of Materials Science}, volume = {31}, number = {7}, pages = {1879 -- 1885}, year = {2019}, }