@article{KloidtStockKleinebergetal.2019, author = {Andreas Kloidt and Hans-J{\"u}rgen Stock and Ulf Kleineberg and Thorsten D{\"o}hring and Michael Pr{\"o}pper and Bernt Schmiedeskamp and Ulrich Heinzmann}, title = {Smoothing of interfaces in ultrathin Mo-Si multilayers by ion bombardment}, journal = {Thin Solid Films}, volume = {228}, number = {1-2}, pages = {154 -- 157}, year = {2019}, }