TY - JOUR A1 - Alexander, Morgan A1 - Short, Robert A1 - Jones, Frank A1 - Stollenwerk, Manfred A1 - Mathar, Gerd A1 - Zabold, Jochen A1 - Michaeli, Walter T1 - An XPS investigation into the chemical structure of deposits formed from hexamethyldisiloxane/oxgen plasmas T2 - Journal of Materials Science KW - Hexamethyldisiloxan KW - Plasma Y1 - 2019 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/1388 VL - 31 SP - 1879 EP - 1885 ER -