@inproceedings{KloidtStockKleinebergetal.2019, author = {Andreas Kloidt and Hans-J{\"u}rgen Stock and Ulf Kleineberg and Thorsten D{\"o}hring and Michael Pr{\"o}pper and Kerstin Nolting and Bernhard Heidemann and Thorsten Tappe and Bernt Schmiedeskamp and Ulrich Heinzmann and Michael K. Krumrey and Peter M{\"u}ller and Frank Scholze and Steffen Rahn and Klaus F. Heidemann}, title = {Fabrication, thermal stability, and reflectivity measurements of Mo/Si multilayers as x-ray mirrors and other optical elements}, booktitle = {Proceedings of SPIE}, volume = {1742}, pages = {593 -- 603}, year = {2019}, }