TY - JOUR A1 - Kloidt, Andreas A1 - Stock, Hans-Jürgen A1 - Kleineberg, Ulf A1 - Döhring, Thorsten A1 - Pröpper, Michael A1 - Schmiedeskamp, Bernt A1 - Heinzmann, Ulrich T1 - Smoothing of interfaces in ultrathin Mo-Si multilayers by ion bombardment T2 - Thin Solid Films KW - Dünne Schicht KW - Oberflächenphysik Y1 - 2019 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/1294 VL - 228 IS - 1-2 SP - 154 EP - 157 ER -