@article{SchmiedeskampKloidtStocketal.2019, author = {Bernt Schmiedeskamp and Andreas Kloidt and Hans-J{\"u}rgen Stock and Ulf Kleineberg and Thorsten D{\"o}hring and Michael Pr{\"o}pper and Steffen Rahn and Kerstin Hilgers and Bernhard Heidemann and Thorsten Tappe and Ulrich Heinzmann and Michael K. Krumrey and Peter M{\"u}ller and Frank Scholze and Klaus F. Heidemann}, title = {Electronbeam-deposited Mo/Si and MoxSiySi multilayer X-ray mirrors and gratings}, journal = {Optical Engineering}, volume = {33}, number = {4}, pages = {1314 -- 1321}, year = {2019}, }