TY - CONF A1 - Kloidt, Andreas A1 - Stock, Hans-Jürgen A1 - Kleineberg, Ulf A1 - Döhring, Thorsten A1 - Pröpper, Michael A1 - Hilgers, Kerstin A1 - Heidemann, Bernhard A1 - Tappe, Thorsten A1 - Schmiedeskamp, Bernt A1 - Heinzmann, Ulrich T1 - Preparation and microstructure analysis of Mo/Si multilayers as x-ray optical elements T2 - Proceedings of Symposium on Surface Science 1993 KW - Röntgenspiegel Y1 - 2019 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/1292 VL - 1993 SP - 115 EP - 120 ER -