TY - JOUR A1 - Schmiedeskamp, Bernt A1 - Kloidt, Andreas A1 - Stock, Hans-Jürgen A1 - Kleineberg, Ulf A1 - Döhring, Thorsten A1 - Pröpper, Michael A1 - Rahn, Steffen A1 - Hilgers, Kerstin A1 - Heidemann, Bernhard A1 - Tappe, Thorsten A1 - Heinzmann, Ulrich A1 - Krumrey, Michael K. A1 - Müller, Peter A1 - Scholze, Frank A1 - Heidemann, Klaus F. T1 - Electronbeam-deposited Mo/Si and MoxSiySi multilayer X-ray mirrors and gratings T2 - Optical Engineering KW - Röntgenspiegel Y1 - 2019 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/1291 VL - 33 IS - 4 SP - 1314 EP - 1321 ER -