@article{BuettnerProbstEmmerichetal.2018, author = {Andre B{\"u}ttner and Anne-Catherine Probst and Florian Emmerich and Christine Damm and Bernd Rellinghaus and Thorsten D{\"o}hring and Manfred Stollenwerk}, title = {Influence of Sputtering Pressure on the Microstructure and Layer Properties of Iridium Thin Films}, journal = {Thin Solid Films}, volume = {2018}, number = {662}, pages = {41 -- 46}, url = {https://doi.org/10.1016/j.tsf.2018.06.056}, year = {2018}, }