@inproceedings{EmmerichThielemann2016, author = {Florian Emmerich and Christiane Thielemann}, title = {Patterning of PMMA by gold-nanoparticle initiated localized decomposition}, booktitle = {2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Changchun, China}, doi = {10.1109/3M-NANO.2015.7425480}, year = {2016}, }