TY - CONF A1 - Emmerich, Florian A1 - Thielemann, Christiane T1 - Direct Visualisation of Stored Charges in PECVD ONO-Layers by Kelvin-Probe-Force-Microscopy T2 - 15th International Symposium on Electrets ISE KW - Kelvin-Sonde KW - Rasterkraftmikroskop Y1 - 2015 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/646 VL - 2014 CY - Baltimore, USA ER -