@inproceedings{EmmerichThielemann2015, author = {Florian Emmerich and Christiane Thielemann}, title = {Direct Visualisation of Stored Charges in PECVD ONO-Layers by Kelvin-Probe-Force-Microscopy}, booktitle = {15th International Symposium on Electrets ISE}, volume = {2014}, year = {2015}, }