@article{FlachsEmmerichThielemann2022, author = {Dennis Flachs and Florian Emmerich and Christiane Thielemann}, title = {Fabrication process for FEP piezoelectrets based on photolithographically structured thermoforming templates}, journal = {Microsystem Technologies}, volume = {2022}, number = {November}, pages = {0 -- 0}, doi = {doi.org/10.1007/s00542-022-05405-6}, url = {Microsystem Technologies https://doi.org/10.1007/s00542-022-05405-6}, year = {2022}, }