TY - GEN A1 - Emmerich, Florian A1 - Ciba, Stefan T1 - Thin-film Micro-Heater for Fusion Bonding of Teflon-FEP Foils T2 - 21th International Student Conference on Electrical Engineering POSTER 2017 N2 - MEMS-based Micro-Heaters, in combination with thin-film temperature sensors, are often used for providing the necessary amount of thermal energy for sensor-applications. In this work, we propose an integrated micro-heater as actuator for fusion bonding of polymers, which can optimize the production process of electret-based micro-energy-harvesters. By adjusting the design parameters of thermoforming-molds, we can implement thin-film micro-heaters that are capable of generating temperatures of above 300°C for numerous cycles. Utilizing the integrated micro-heater allows local fusion bonding of Fluoroethylenepropylene (Teflon-FEP) foils on a micrometer-scale while reducing unnecessary thermal stress. This is beneficial for the longevity of the micro-energy-harvesters, while simultaneously improving its performance. N2 - Poster KW - Energy-Harvesting KW - Fusion Bonding KW - Micro-Heater KW - SU-8 KW - Teflon-FEP KW - Mikrosystemtechnik Y1 - 2017 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/1529 VL - 2017 IS - POSTER 2017 SP - 1 EP - 5 ER -