TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Influence of pulse duration on high-precision manufacturing of 3D geometries T2 - Journal of Laser Micro/Nanoengineering KW - Dreidimensionale Geometrie Y1 - 2018 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/1588 VL - 13 IS - 3 SP - 292 EP - 295 ER -