TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Homogeneous low spatial frequency LIPSS on dielectric materials generated by beam-shaped femtosecond pulsed laser irradiation T2 - Journal of Laser Micro/Nanoengineering KW - Femtosekundenlaser Y1 - 2018 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/1589 VL - 13 IS - 2 SP - 90 EP - 94 ER -