TY - CONF A1 - Schwarz, Simon A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Homogeneous low spatial frequency LIPSS on dielectrics generated by beam-shaped femtosecond pulsed laser irradiation T2 - LPM2018 The 19th International Symposium on Laser Precision Microfabrication KW - Femtosekundenlaser Y1 - 2018 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/1597 ER -