@inproceedings{SchwarzEsenHellmann2018, author = {Simon Schwarz and Cemal Esen and Ralf Hellmann}, title = {Homogeneous low spatial frequency LIPSS on dielectrics generated by beam-shaped femtosecond pulsed laser irradiation}, booktitle = {LPM2018 The 19th International Symposium on Laser Precision Microfabrication}, year = {2018}, }