@article{SchwarzRungEsenetal.2021, author = {Simon Schwarz and Stefan Rung and Cemal Esen and Ralf Hellmann}, title = {Ultrashort pulsed laser backside ablation of fused silica}, journal = {Optics Express}, volume = {29}, number = {15}, pages = {23477 -- 23486}, year = {2021}, }