TY - JOUR A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Ultrashort pulsed laser backside ablation of fused silica T2 - Optics Express KW - Femtosekundenlaser KW - Quarzglas KW - Mikrobearbeitung Y1 - 2021 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/1925 VL - 29 IS - 15 SP - 23477 EP - 23486 ER -