TY - CONF A1 - Koller, Georg A1 - Hessler, Steffen A1 - Rosenberger, Manuel A1 - Belle, Stefan A1 - Hellmann, Ralf T1 - Micro-structured optical waveguide fabrication in PMMA using low frequency reactive ion etching T2 - Proceedings of the XXVI International MicroCAD Conference – Sensing Technologies, Miskolc (Hungary) KW - waveguide fabrication KW - Wellenleiter Y1 - 2014 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/101 ER -