TY - JOUR A1 - Adelmann, Benedikt A1 - Hürner, Andreas A1 - Schlegel, Tobias A1 - Bauer, Anton A1 - Frey, Lothar A1 - Hellmann, Ralf T1 - Laser Alloying Nickel on 4H-Silicon Carbide Substrate to Generate Ohmic Contacts T2 - Journal of Laser Micro/Nanoengineering KW - Ohm-Kontakt KW - Nickellegierung Y1 - 2014 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/387 VL - 8 IS - 1 SP - 97 EP - 101 ER -