TY - JOUR A1 - Rung, Stefan A1 - Rexhepi, Mal A1 - Bischoff, Christian A1 - Hellmann, Ralf T1 - Laserscribing of thin films using top-hat laser beam profiles T2 - Journal of Laser Micro/Nanoengineering KW - Laser scribing KW - laser beam shaping KW - Top-Hat KW - Dünne Schicht KW - Laser Y1 - 2013 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/400 VL - 8 IS - 3 SP - 309 EP - 314 ER -