TY - JOUR A1 - Lutz, Christian A1 - Schwarz, Simon A1 - Marx, Jan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Multi-Bessel Beams Generated by an Axicon and a Spatial Light Modulator for Drilling Applications T2 - MDPI Photonics N2 - We report on an optical setup to generate multi-Bessel beam profiles combining a refractive axicon and a spatial light modulator. Based on their particular beam profile, Bessel beams offer advantageous properties for micro drilling processes and internal volume processing, especially for transparent materials. In addition, the laser power of industrial, ultrashort pulsed lasers has increased significantly over the last few years, offering the possibility for highly efficient processes using multi-spot profiles. Our optical concept combines the dynamic possibilities of beam splitting using a spatial light modulator with the benefits of Bessel beams, which facilitates multi-Bessel beam processing. Beside the simulation and experimental evaluation of the generated multi-Bessel beams, we exemplify the applicability of the developed module for the perforation of thin metal foils by micro drilling. KW - Bessel beam KW - Axicon KW - Optical System KW - Ultrashort pulsed laser KW - Material ablation KW - Bessel-Bündel KW - Ultrakurzzeitlaser Y1 - 2023 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/2256 UR - https://www.mdpi.com/2304-6732/10/4/413 VL - 2023 IS - 10/413 SP - 1 EP - 9 ER -