TY - CONF A1 - Rung, Stefan A1 - Hellmann, Ralf T1 - Laser scribing of metallized transparent conductive oxide – A comparative study using top hat and Gaussian beam profiles T2 - Proceedings of the XXVI International MicroCAD Conference – Material Processing Technologies KW - laser scribing KW - Laserbearbeitung KW - Laserritzen Y1 - 2014 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/105 ER -