@inproceedings{BischoffJaegerRungetal.2013, author = {Christian Bischoff and Erwin J{\"a}ger and Stefan Rung and Ralf Hellmann}, title = {Diffractive beam shaping optics for efficient micromachining}, booktitle = {Proceedings of the LASYS (Internationale Fachmesse f{\"u}r Laser-Materialbearbeitung) - SLT (Stuttgarter Lasertage) 2012}, year = {2013}, }