TY - CONF A1 - Rung, Stefan A1 - Rexhepi, Mal A1 - Hellmann, Ralf T1 - Beam shaping for enhanced through-put of laser ablation of transparent conductive films T2 - Proceedings of the XXVII MicroCAD International Scientific Conference KW - Laserablation Y1 - 2013 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/415 VL - 2013 ER -