@inproceedings{KeferZettlSchmaussetal.2023, author = {Stefan Kefer and Julian Zettl and Bernhard Schmauss and Cemal Esen and Ralf Hellmann}, title = {High-Precision Micromachining of Sapphire Towards Optical Waveguiding Structures using Femtosecond Lasers}, booktitle = {Laser-based Micro- and Nanoprocessing XVII}, editor = {Rainer Kling and Wilhelm Pfleging and Akira Watanabe}, pages = {3 -- 11}, doi = {10.1117/12.2648758}, year = {2023}, }