@inproceedings{JaegerRaedelBischoffetal.2014, author = {Erwin J{\"a}ger and Ulrich R{\"a}del and Christian Bischoff and Udo Umhofer and Stefan Rung and Ralf Hellmann}, title = {Laser micromachining - parallel processing with multiple top hat beams}, booktitle = {8th International Conference on Photonic Technologies LANE 2014}, year = {2014}, }