@inproceedings{BischoffMueckeEsenetal.2023, author = {Kay Bischoff and Dominik M{\"u}cke and Cemal Esen and Ralf Hellmann}, title = {UV-Femtosecond-Laser Structuring of Silicon Carbide}, booktitle = {International Congress on Applications of Lasers \& Electro-Optics (ICALEO) 2023}, year = {2023}, }