TY - CONF A1 - Risch, Anna A1 - Hellmann, Ralf T1 - ITO thin film laser patterning by picosecond laser T2 - Proceeding XXV microCAD, International scientific conference, 2011, Section K: Material science/Material processing technologies KW - Laserbearbeitung Y1 - 2014 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/235 SP - 63 EP - 68 ER -