TY - CONF A1 - Rung, Stefan A1 - Bischoff, Christian A1 - Jäger, Erwin A1 - Umhofer, Udo A1 - Hellmann, Ralf T1 - Laser thin film ablation with multiple beams and tailored beam profiles T2 - Proceedings of SPIE 8967, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XIX KW - Thin film KW - Ablation KW - Top-Hat KW - Parallel Processing KW - Beam-Splitter KW - Laserablation KW - Dünnschichttechnik Y1 - 2014 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/396 VL - 8967 ER -