@inproceedings{KollerHesslerRosenbergeretal.2014, author = {Georg Koller and Steffen Hessler and Manuel Rosenberger and Stefan Belle and Ralf Hellmann}, title = {Micro-structured optical waveguide fabrication in PMMA using low frequency reactive ion etching}, booktitle = {Proceedings of the XXVI International MicroCAD Conference - Sensing Technologies, Miskolc (Hungary)}, year = {2014}, }