TY - CONF A1 - Schwarz, Simon A1 - Rung, Stefan A1 - Hellmann, Ralf T1 - High quality one-dimensional low spatial frequency LIPSS on sapphire generated by Top-Hat beam shaped ultrashort-pulsed laser T2 - MultiScience - XXXI. microCAD International Multidisciplinary Scientific Conference KW - Ultrakurzzeitlaser Y1 - 2017 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/1598 ER -