TY - CONF A1 - Franz, Daniel A1 - Roth, Gian-Luca A1 - Rung, Stefan A1 - Esen, Cemal A1 - Hellmann, Ralf T1 - Superimposed beam deflection using acousto-optical deflectors in combination with a galvanometer scanner T2 - Lasers in Manufacturing - LiM 2021 KW - Galvanometer Y1 - 2021 UR - https://opus4.kobv.de/opus4-h-ab/frontdoor/index/index/docId/1897 ER -