Controlling the assembly of micro systems by image processing
Author: | Robert Schmitt, Sascha Driessen, Bastian Engelmann |
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Parent Title (English): | Microsystem technologies |
Document Type: | Article |
Language: | English |
Year of publication: | 2006 |
Release Date: | 2023/08/17 |
Volume: | 12 |
Pages/Size: | 6 |
First Page: | 640 |
Last Page: | 645 |