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The composition analysis of YBa2Cu3O7-δ or PrBa2Cu3O7-δ thin films and (YBa2Cu3O7-δ/PrBa2Cu3O7-δ) n heterostructures prepared by CVD

  • Some YBa2Cu3O7-δ films and heterostructures prepared by Chemical Vapor Deposition (CVD) were analyzed in our laboratories by EPMA-EDX or WDX, RBS, SNMS and AES. It was found that in some cases the results of composition analysis can significantly deviate from each other. At least two main reasons for these deviations exist: the different lateral resolution and the application of different reference samples for the calibration.

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Metadaten
Author:Jürgen Hartmann
Persistent identifier:https://link.springer.com/article/10.1007/s002160050305
Parent Title (English):Fresenius' journal of analytical chemistry
Document Type:Article
Language:English
Year of publication:1997
Publishing Institution:Hochschule für Angewandte Wissenschaften Würzburg-Schweinfurt
Release Date:2020/12/04
Volume:357
Issue:8
First Page:1061
Last Page:1065
Dewey Decimal Classification:5 Naturwissenschaften und Mathematik / 54 Chemie / 541 Physikalische Chemie
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