Process observation of the assembly of hybrid microsystems
Author: | Tilo Pfeifer, Bastian Engelmann |
---|---|
Parent Title (English): | Conference Proceeding of 12th International Conference on Experimental Mechanics in Bari |
Document Type: | Conference Proceeding |
Language: | English |
Year of publication: | 2004 |
Release Date: | 2023/08/17 |