Messstrategien für die zerstörungsfreie Schichtmessung mittels Ultraschallmikroskopie Strategies for the Non-Destructive Characterization of Thin Layers with Scanning Acoustic Microscopy
Author: | Robert Schmitt, Björn Dietrich, Philip Hafner, Bastian Engelmann |
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Parent Title (English): | tm - Technisches Messen |
Document Type: | Article |
Language: | English |
Year of publication: | 2008 |
Release Date: | 2023/08/17 |
Volume: | 75 |
Issue: | 11 |
Pages/Size: | 9 |
First Page: | 577 |
Last Page: | 585 |